Gas sensor based on gas discharge spectral analysis and method for testing gas thereof

Abstract

The invention discloses a gas sensor which is based on the aerial discharge spectroscopic analysis and a method for detecting gas, wherein, the sensor comprises a polarizing electrode, a grid electrode, a bandpass spectral filter and a light-sensitive unit; the grid electrode and the bandpass spectral filter are positioned between the polarizing electrode and the light-sensitive unit, and a discharge region is formed by a gas clearance between the grid electrode and the polarizing electrode; the grid electrode has a hollow-out structure, which can cause the gas inside and outside the discharge region to communicate; the bandpass spectral filter can selectively cause that characteristic light radiation generated by target gas passes through the discharge region; the light-sensitive unit can not only receive the characteristic radiation generated by the target gas, but also convert the characteristic radiation into electric signals; and by detecting the electric signal output of the light-sensitive unit, the ingredients and the concentration of the target gas can be qualitatively or quantificationally analyzed. The sensor can be manufactured on chip integrally so that an on-chip arrayed and minimized aerial discharge spectroscopic analyzing device can be formed.

Description

technical field [0001] The present invention relates to a gas sensor and a detection method in the technical field of detection, in particular to a gas sensor based on gas discharge spectrum analysis and a method for detecting gas. Background technique [0002] The gas discharge spectroscopic analysis method is one of the gas composition detection and analysis methods with the highest detection accuracy and confidence, and plays a very important role in important fields such as aerospace, national defense, public safety, air environment monitoring, and soil resource monitoring. . After a certain modification, the gas discharge spectroscopic analysis device can usually be used for the composition analysis of solid and liquid samples at the same time, so its versatility further broadens its application range. However, with the development trend of miniaturization of gas sensors, the development of gas discharge spectroscopy is very slow and lagging behind in recent years beca...

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Problems solved by technology

However, the sensitivity and detection accuracy of such devices to mixed gases cannot reach the level of gas discharge spectroscopy analysis only through the existing gap breakdown critical voltage detection or partial self-sustained discharge current amplitude detection.

In addition, as the statistical result of inelastic collisions between a large number of neutral molecules and charged particles, only through the gap breakdown critical voltage detection or partial self-sustained discharge current amplitude detection in the paper, this type of device is suitable for the two types of ionization coefficients with small differences. Gas selectivity is poor

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