Small gapping place relatively rotating measuring and rotating positioning system and method

A relative rotation and plane-to-plane technology, applied in the field of precision measurement, can solve problems such as large accuracy errors, and achieve the effects of easy debugging, strong process adaptability, and simple and effective determination methods

Inactive Publication Date: 2009-04-29
XI AN JIAOTONG UNIV
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Problems solved by technology

[0005] Aiming at the problem of large errors in rotation, positioning and alignment accuracy in contact or proximity lithography, the present invention p

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  • Small gapping place relatively rotating measuring and rotating positioning system and method
  • Small gapping place relatively rotating measuring and rotating positioning system and method
  • Small gapping place relatively rotating measuring and rotating positioning system and method

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[0034] The present invention will be further described below in conjunction with the drawings:

[0035] The invention can be used figure 1 Reflective measurement system as shown or as figure 2 Transmissive measurement system shown. The measurement system includes a plane 1 and a plane 2 that need to be rotated and positioned, as well as an imaging lens group 3, a charge coupling device image sensor CCD 4 and a light source 5. For the reflection type measurement system, a beam splitter 6 is also included. The magnification of the lens group 3 in the optical system is selected according to the grating size and the size of the charge coupling device image sensor CCD 4, and it is ensured that the charge coupling device image sensor CCD 4 can collect more than 40 fringes. The plane 1 and plane 2 that need to be positioned contain grating marks for zero-point positioning and rotation measurement, such as image 3 with Figure 4 As shown, the grating pitches of the grating 7 and the gr...

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Abstract

The invention discloses a system and a method for the high-precision measurement direction sensing and rotary positioning of relative micro-rotation between two planes. Two gratings are arranged on the two planes to form two groups of measurement grating pairs. When the amount of relative rotation between the two planes is zero, grid lines of all gratings are in the same direction. Two groups of measurement grating pairs are opposite in the size relation of grating size but identical in period ratio. The number of fringes acquired by a measurement system is not less than 40. The method for measurement direction sensing and rotary positioning comprises the following steps of adopting the dimensions of fringe inclination angles obtained in the horizontal-vertical direction and two diagonal directions to obtain the directions of the fringe inclination angles. When two groups of interference fringes are identical in direction, rotary zero-point positioning is realized between the two planes, and when two groups of interference fringes are different in direction, relative rotation amount exists between the two planes.

Description

technical field [0001] The invention belongs to the field of precision measurement in micro-manufacturing, in particular to a system and method for relative rotation measurement and rotation positioning between small gap planes based on grating interference theory. Background technique [0002] In integrated circuit manufacturing, accuracy, resolution and production capacity are the basic indicators to measure any lithography process. Due to the complex graphics of VLSI and ULSI, the requirements for subsequent graphics and device processing are also different. Likewise, very high stitching and registration accuracy is required during fabrication. As one of the most powerful candidate technologies for sub-0.1 micron lithography in the future, imprint lithography applies the traditional mold replica principle to the field of micro-manufacturing. It is a low-cost integrated circuit manufacturing technology, but in multilayer imprinting In step-by-step imprinting, the alignmen...

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Application Information

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IPC IPC(8): G01B11/26G03F7/20
Inventor 刘红忠丁玉成邵金友王莉肖本好尹磊史永胜蒋维涛
Owner XI AN JIAOTONG UNIV
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