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Pixel construction and manufacturing method thereof

A technology of pixel structure and manufacturing method, applied in semiconductor/solid-state device manufacturing, optics, instruments, etc., to achieve the effect of good electrical quality

Inactive Publication Date: 2010-09-15
CHUNGHWA PICTURE TUBES LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this way, the electrical quality of the thin film transistor 100 will not be improved

Method used

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  • Pixel construction and manufacturing method thereof
  • Pixel construction and manufacturing method thereof
  • Pixel construction and manufacturing method thereof

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Embodiment Construction

[0049] Figure 2A to Figure 2J A flow cross-sectional view of a manufacturing method of a pixel structure according to an embodiment of the present invention is shown. Please refer first Figure 2A The manufacturing method of the pixel structure of this embodiment includes the following steps. First, a gate 220 and a gate insulating layer 230 are sequentially formed on the substrate 210, and the gate insulating layer 220 covers the gate 220. The method of forming the gate 220 is, for example, a physical vapor deposition process or a chemical vapor deposition process to form a metal material layer (not shown) on the substrate 210. Then, a patterning process is performed on the metal material layer to form the gate 220, wherein the patterning process includes a photolithography process and an etching process. In fact, the gate 220 may also be composed of multiple layers of metal. In addition, the method of forming the gate insulating layer 230 is, for example, a chemical vapor ...

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Abstract

The invention relates to a pixel structure and a manufacturing method thereof for reducing leakage current. The pixel structure comprises a grid electrode, a grid insulating layer, a semiconductor layer, an ohmic contact layer, a source electrode, a drain electrode, a first patterning dielectric layer, a second patterning dielectric layer and a pixel electrode which are arranged on the base platein sequence. The grid electrode is covered by the grid insulating layer, and the semiconductor layer is positioned above the grid electrode. The ohmic contact layer is arranged on the semiconductor layer; the source electrode and the drain electrode expose out of partial semiconductor layer exposing out of the ohmic contact layer. The source electrode / the drain electrode above the grid electrode is covered by the first patterning dielectric layer and the partial semiconductor layer is exposed. The first patterning dielectric layer and the second first patterning dielectric layer are respectively provided with a first opening and a second opening to expose the partial drain electrode. The pixel electrode is electrically connected with the drain electrode by means of the first and the second openings.

Description

technical field [0001] The present invention relates to a pixel structure and a manufacturing method thereof, and in particular to a pixel structure applied to a thin film transistor liquid crystal display and a manufacturing method thereof. Background technique [0002] The thin film transistor liquid crystal display panel is mainly composed of a thin film transistor array substrate, a color filter array substrate and a liquid crystal layer. The thin film transistor array substrate is composed of a plurality of pixel structures arranged in an array, and each pixel structure includes a thin film transistor and A pixel electrode (Pixel Electrode) configured corresponding to each thin film transistor. The thin film transistor mentioned above includes a gate, a semiconductor layer, a drain and a source, and the thin film transistor is a switching element used to control whether the pixel electrode is charged or not. [0003] Figure 1A and Figure 1B It is a cross-sectional...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/84H01L21/768H01L27/12H01L23/522G02F1/1362
Inventor 林宜平邱羡坤赖钦诠邱绍裕杨淑贞
Owner CHUNGHWA PICTURE TUBES LTD
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