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70results about How to "Improve electrical quality" patented technology

Integrated passive device wafer-level packaging three-dimensional stacked structure and manufacturing method

The invention relates to an integrated passive device wafer-level packaging three-dimensional stacked structure and a manufacturing method. The integrated passive device wafer-level packaging three-dimensional stacked structure comprises a wafer-level packaging chip and an IPD chip. The IPD chip comprises a glass substrate, wherein an IPD device and a metal wiring layer are arranged on the front surface of the glass substrate, the back surface of the glass substrate is etched to form TGV holes, back surface metal wiring layers are arranged on the back surface of the glass substrate and the inner surfaces of the TGV holes, a welding ball is arranged on a welding pad of each back surface metal wiring layer, and the welding balls are connected with a PCB. The manufacturing method of the three-dimensional stacked structure comprises the following steps that (1) the wafer-level packaging chip and the IPD chip of the glass substrate are stacked; (2) the back surface of the IPD chip is etched to form the TGV holes, the back surface metal wiring layer is manufactured on the back surface of the glass substrate; (3) the back surface metal wiring layer is etched into two insulated parts; the welding pads and welding balls are manufactured on the two parts of the back surface metal wiring layer, and the welding balls are connected with the PCB. By means of the integrated passive device wafer-level packaging three-dimensional stacked structure and the manufacturing method, short-distance interconnection between the chip and the IPD device is achieved, and the electric quality is improved.
Owner:NAT CENT FOR ADVANCED PACKAGING

Manufacturing method of thin film transistor and manufacturing method of array substrate

The invention provides a manufacturing method of a thin film transistor. A method for forming a back channel comprises the following steps: S21, laminating and manufacturing an active material film, asource and drain electrode material film and a photoresist material film on a gate insulation layer so as to obtain an etched substrate; S22, carrying out primary wet etching, primary dry etching andphotoresist burning and secondary wet etching on the etched substrate in sequence so as to form a source electrode, a drain electrode and a photoresist layer; S23, etching the active material film byadopting a first etching gas so as to form the back channel; and S24, removing the photoresist layer by adopting a second etching gas so as to obtain the thin film transistor. According to the manufacturing method, a copper stripping solution can be avoided from being used when the back channel is etched, and the compositions and using amounts of various etching gases are reasonably matched, so that the problems of copper ion diffusion and pollution of other impurity ions in the copper stripping solution in the prior art are further avoided while back channel etching and photoresist removal are completed. The invention also provides application of the manufacturing method in an array substrate.
Owner:WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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