Large-range plane three-freedom degree precision fine motion device and control method thereof

Abstract

A large stroke planar three-freedom accurate vernier arrangement and its control method. The device comprises a controller, a piezoelectric driver supply power, a working table, an optical lens and a two-dimension optoelectronic position sensitive detector which are arranged at the lower part of the working table in turn. The outer frame of the working table is provided with a translational tableprovided with a rotatable objective table. The controller detects the displacement of the objective table by the optical lens and the two-dimension optoelectronic position sensitive detector and compares with the preset displacement to obtain needed control voltage, drives the corresponding translational driver or rotary driver to work by the piezoelectric driver supply power to form a feedback control, makes the objective table have three freedom of front-back and left-right translation and rotation revolving about the center. The flexible hinges are arranged symmetrically so as to remove the coupling in the moving direction. The large stroke planar three-freedom accurate vernier arrangement has a large work stroke, a high positioning accuracy, no movement gap, a compact structure, a small volume and can be controlled from the micrometer level to the submicron level.

Description

technical field [0001] The invention relates to a large-stroke precision micro-motion device and a control method thereof, in particular to a large-stroke planar three-degree-of-freedom precision micro-motion platform suitable for a biological cell microscopic operating system stage or a microscope stage. Background technique [0002] Micro-motion technology is one of the key technologies in precision manufacturing, precision measurement and precision driving, and is widely used in ultra-precision machining, semiconductor technology, microscope technology, bioengineering and other technical fields that require micro- and nano-scale displacement and positioning. As one of the key technologies, micro-motion technology occupies an extremely important position in modern cutting-edge industrial production and scientific research. With the rapid development of high and new technologies such as micro-electromechanical technology, semiconductor technology, biotechnology, and precisi...

AI Technical Summary

Problems solved by technology

At present, arc flexible hinges are mostly used to build micro-displacement workbenches. Due to the limitation of hinge deformation, the range of motion of the entire platform is limited; in addition, the use of displacement coupling to achieve the degree of freedom of platform rotation increases the complexity of the control system. In terms of detection methods, the use of contact measurement or grating sensor measurement is limited by the installation space, and the use of light lever method for measurement makes the detection system too complicated

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