Double-torsion bar resonance scanning reflection mirror
A technology of scanning mirrors and mirrors, which is applied in the direction of optics, instruments, electrical components, etc., to achieve the effects of ensuring stability, high structural rigidity and stability, and reducing the influence of surface shape
Inactive Publication Date: 2009-07-08
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology
[0004] The technical problem to be solved by the present invention is: to overcome the deficiencies of the prior art, the present invention provides a double torsion bar resonant scanning mirror, which can solve the problem of high-frequency scanning of large optical apertures
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[0017] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0018] figure 1 and figure 2 The composition of the mechanical vibration part of the double torsion bar resonant scanning mirror of the present invention has been described as a whole, Figure 3 to Figure 10 The sub-components are described in detail. 5 is the installation substrate of the whole mechanism, the mirror assembly arms 9A and 9B are fixed on the substrate 5 with screws through the holes 6A and 6B, and the driving coils 2A and 2B are fixed on the substrate through the installation holes 7A and 7B with screws Above 5, 8 is the installation hole that this double torsion bar resonant scanning reflector is fixed. The support arms 9A and 9B are integrally processed with the base plate 5 or are fixedly connected by support arm parts and base plate parts to form a support system. The scanning mirror assembly 1 is the core of the mech...
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The invention relates to a double-torsion bar resonance scanning reflector, which comprises a scanning reflector component, a support system, a driving system, a position feedback system and a closed ring controlling system. The scanning reflector component comprises two torsion bars and a reflector body, and can generate reciprocating vibration around two rod tie lines corresponding to the exciting force amplitude when receiving the period force excitation having the same frequency as the mechanical resonance of the scanning reflector; the support system consists of a substrate and a support arm and provides necessary support and restriction for the scanning reflector component; the driving system consists of a permanent magnet and a driving coil and is used for driving the scanning reflector component to vibrate without contact; the position feedback system consists of a position sensor and a feedback signal processing circuit and is used for acquiring position feedback signals which are proportionable to the vibration amplitude of the scanning reflector component with high sensitivity and noise inhibition; and the closed ring controlling system consists of a driving system, a position feedback system and a driving signal generating circuit and is used for controlling the scanning reflector component to vibrate stably. The double-torsion bar resonance scanning reflector can realize light beam scanning with large calibre and high frequency.
Description
technical field [0001] The invention relates to a resonant scanning device for providing beam scanning for an optical system. Background technique [0002] A scanner (scanner) is an element that reciprocally scans the electromagnetic radiation beam along a straight line by moving reflective or transmissive components. It is often a combination of optical, mechanical, and electrical components. Scanners have a wide range of uses, from high-speed printers, optical storage devices, barcode readers, letterpress cameras, laser cameras, laser scanning microscopes, computer micro-equipment to early warning systems, tracking systems, satellite communications, etc. It can be found in equipment and optical instruments on satellites, and its application range is constantly expanding. There are many types of existing scanners, which can be divided into continuous rotation scanners and vibrating scanners according to the movement mode. There are different types of scanners such as galva...
Claims
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IPC IPC(8): G02B26/10H02K33/18G01D5/12
Inventor 韩维强沈忙作廖胜
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI