Light beam transmission apparatus and method
A technology of a transmission device and a transmission method, which is applied in the field of photolithography exposure systems, can solve the problems that cannot be found and corrected in time, the telecentricity and uniformity indicators of the lighting system cannot meet the requirements, etc., and achieve stable telecentricity and uniformity. Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0041] The invention will be further described below in conjunction with the accompanying drawings.
[0042] image 3 It is the overall structure diagram of the beam transmission system of this embodiment, including: a laser 1, a beam expander 2, a first controllable mirror 31 and a second controllable mirror 32, which belong to the beam control unit, 41 and 42 are beam splitters , used to sample and split the beam; 501, 502, and 503 are focusing lenses, which point the beam to the measurement optical path; 601 and 602 are YAG:Ce crystals, which convert the 193nm wavelength of ultraviolet light into visible light; 701, 702, 703, and 704 801, 802, 803 and 804 are relay lenses; 901 and 902 are sensors for measuring the beam position and angle respectively; 10 is a controller; 111 is a diffractive optical element (DOE), which is the exit.
[0043] The beam emitted by the laser light source 1 is incident on the beam control unit after being expanded by the beam expander 2. The b...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com