Grating optical modulator and array based on flexible support structure
An optical modulator and flexible support technology, applied in instruments, optics, optical components, etc., can solve the problems of high driving voltage and complex device process, and achieve the effect of reducing driving voltage, simple process, and increasing the wavelength range of incident light.
Inactive Publication Date: 2009-08-05
CHONGQING UNIV
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Problems solved by technology
[0006] The programmable grating of Polychromix company in the United States adopts a three-layer structure, which ensures that the device has a high surface flatness in the working state, but the three-layer MEMS structure leads to complex device technology and high driving voltage.
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[0034] see figure 1 , figure 2 and image 3 , the structural composition of a single pixel of the flexible support structure-based grating light modulator includes an upper movable grating 1, a lower reflector 3, a flexible support structure 2, a fixed support column 4, a base 5, and the like. It is made as follows:
[0035] A metal layer is first deposited on the silicon substrate 5 using peroxidation technology to form the lower mirror electrode layer 32, and then a layer of silicon dioxide is deposited on it to play an insulating role;
[0036] The flexible support structure 2 and the movable grating 1 on the upper layer are made by using the sacrificial layer technology. There is a suitable air gap between the lower reflection mirror 3 and the upper movable grating 1 . One end of the flexible support structure 2 supporting the upper movable grating 1 is supported on four fixed support columns 4 on the base, and the other end is connected to the four corners of the upp...
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The invention relates to an optical grating photomodulator based on a flexible supporting structure and a linear array. The photomodulator comprises a fundus, a lower-layer reflecting mirror composed of an electrode layer and an insulation layer, an upper-layer movable optical grating and a flexible supporting structure used for supporting the upper-layer movable optical grating. The clearance between the upper-layer movable optical grating and the lower-layer reflecting mirror is an air clearance. When the distance between the upper-layer movable optical grating and the lower-layer reflecting mirror is odd number times of a quart of wavelength, the optical grating photomodulator is in a diffraction state through exerting different voltage to the photomodulator, which means to transfer the energy of the incoming ray to a plus-minus first level equal step order of the diffraction light; when the distance between the upper-layer movable optical grating and the lower-layer reflecting mirror is an integer times of the wavelength, the optical grating photomodulator is in a reflection state, which means to transfer the energy of the incoming ray to zero order reflecting light; the regulation of brightness and darkness of emergent light can be realized through exerting alternative voltage. The photomodulator increases the wavelength of the light, reduces slaving voltage and increases effective optical area.
Description
technical field [0001] The invention relates to a light modulation device; more specifically, the invention relates to a grating light modulator and array based on a flexible support structure. Background technique [0002] The prior art has disclosed a variety of optical modulators based on MEMS technology that can be used alone or together with other modulators, and these modulators include digital micromirror devices (DMDs) and grating light valves (GLVs). [0003] The micromirror device of Texas Instruments is a modulator composed of millions of deflectable reflective micromirrors manufactured by MEMS technology. The tight gap of the DMD micromirror makes the projected image produce a more detailed and seamless picture with high analytical power. However, the defect of DMD is that its complex multi-layer structure leads to complicated manufacturing process and low yield. The modulator currently only works in the visible light band used for display. [0004] Grating li...
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Inventor 陈伟民韦玮王宁张洁朱永
Owner CHONGQING UNIV