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Method for measuring straightness accuracy and position thereof based on double frequency interference principle

A measuring device and straightness technology, applied in the direction of measuring devices, optical devices, instruments, etc., to achieve the effect of eliminating the influence of environmental factors, simple optical path structure, and easy to use

Inactive Publication Date: 2009-11-18
ZHEJIANG SCI-TECH UNIV
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Problems solved by technology

Using the principle of laser heterodyne interference, it not only realizes the straightness measurement with nanometer precision, but also realizes the nanoscale displacement measurement of the measured straightness position, and solves the technical problem of simultaneous measurement of nanometer-level high-precision straightness and its position

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  • Method for measuring straightness accuracy and position thereof based on double frequency interference principle
  • Method for measuring straightness accuracy and position thereof based on double frequency interference principle
  • Method for measuring straightness accuracy and position thereof based on double frequency interference principle

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Embodiment Construction

[0015] The present invention will be further described below in conjunction with drawings and embodiments.

[0016] The measurement method of straightness and its position based on the principle of double-frequency interference is as follows: figure 1 Shown: The light source is a transverse Zeeman effect He-Ne dual-frequency laser 1, the laser has a central wavelength of 632.8nm and outputs two different frequencies f 1 and f 2 The orthogonal linearly polarized light has a frequency difference of 1.9MHz. The laser beam emitted by the laser 1 is divided into two beams by the ordinary beam splitter 2, and the reflected beam is incident on the first analyzer 3. Since the transmission direction of the analyzer is at an angle of 45° to the two orthogonal linearly polarized lights, the two beams can be separated Orthogonal linearly polarized light is decomposed into the same vibration transmission direction to form a beat frequency, which is received by the first photodetector 4 a...

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Abstract

The invention discloses a method for measuring straightness accuracy and positions thereof based on double frequency interference principle. The measuring method adopts an optical laser outputting g cross-line polarized lights, a common spectroscope, a depolarization dispersion prism, a polarization splitting prism, a Wollaston prism, three analyzers, three photodevices and a measurement reflecting mirror comprising a right-angle prism. The measuring method utilizes the dichroism and polarization property of optical devices to make up a double light path measurement structure based on the heterodyne interference principle; the simultaneous measurement of the straightness accuracy and the positions thereof is realized by measuring the optical path difference of the double path, thus having measuring accuracy of the nanometer straightness accuracy and the positions thereof. The method is mainly applied in the motion displacement measurement of an accurate work table, the straightness accuracy detection of an accurate guide rail and the like belonging to fields such as super-precision processing technology, micro-photo dynamoelectric systems, integrated circuit chip manufacturing technology, etc.

Description

technical field [0001] The invention relates to a measuring device characterized by adopting an optical method, in particular to a measuring device for straightness and its position based on the principle of double-frequency interference. Background technique [0002] Looking at the measurement methods of straightness at home and abroad, according to whether there is a straight line reference, the measurement methods of straightness can be roughly divided into two categories: the first type is the measurement method without a straight line reference, which mainly uses the error separation method, and according to the information acquisition There are different approaches. The non-linear benchmark measurement method can be divided into reverse method, dislocation method and multi-probe method. The error separation method is practical and reliable, and is suitable for online or offline measurement. Multiple measurement errors can be obtained in one measurement, but this method ...

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Application Information

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IPC IPC(8): G01B11/26G01B11/00G01B11/02
Inventor 陈本永张恩政严利平杨涛周砚江
Owner ZHEJIANG SCI-TECH UNIV
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