Micro cantilever beam driving member based on antiferroelectric thick film field induced phase transition strain effect
A micro-cantilever, field-induced phase transition technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, electrical components, circuits, etc., can solve the problems of complex manufacturing process, low control precision, low response frequency, etc. To achieve the effect of easy driving effect, good dielectric properties, and large driving force
Inactive Publication Date: 2011-05-11
ZHONGBEI UNIV
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Problems solved by technology
[0005] In order to solve the technical bottleneck problems of high driving voltage, slow response speed, low response frequency, small driving displacement, complicated manufacturing process and low control precision in the driving components of the existing micro-actuator, the present invention provides a fast response and large Displacement Characteristic Based on Antiferroelectric Thick Film Field-Induced Phase Transition Strain Effect of Microcantilever Beam Driving Components
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[0019] The microcantilever driving component based on the field-induced phase transition strain effect of the antiferroelectric thick film is processed and manufactured according to the following process steps:
[0020] ①. Prepare lead-based antiferroelectric material precursor sol with a concentration of 0.2mol / l-0.6mol / l and PbO sol with a concentration of 0.2mol / l-0.4mol / l by sol-gel technology;
[0021] ②. Silicon base or Pt / TiO coated with Pt metal layer on the surface 2 / SiO 2 / Si as the supporting substrate, the lead-based antiferroelectric material precursor sol prepared in step ① is spin-coated on the Pt metal layer 2 of the supporting substrate at a spinning speed of 2000-4000r / min through a homogenizer, and the spinning time is 10s to 30s; and after coating, place the support base in a tube furnace for 8 to 20 minutes of heat treatment at a temperature of 400°C to 600°C. After heat treatment, take it out of the tube furnace, cool to room temperature, and repeat the ...
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The invention relates to a driving member for a micro actuator, in particular to a micro cantilever beam driving member based on an antiferroelectric thick film field induced phase transition strain effect, which solves the problems existing in the driving member of the prior actuator of slow response, small driving displacement and the like. The method for preparing the member adopts the following steps: (1) preparing a precursor sol of a lead based antiferroelectric material and a PbO sol; (2) preparing a thick film of the lead based antiferroelectric material on a Pt metallic layer of a supporting substrate; (3) spin-coating the PbO sol on the thick film of the lead based antiferroelectric material, and carrying out the annealing treatment; (4) sputtering a metallic layer on the thick film of the lead based antiferroelectric material, which is used as a top electrode, and a pressure welding point; and (5) corroding the back surface of the support substrate, and reducing the thickness of the middle of the support substrate; etching the thick film of the lead based antiferroelectric material and the front face of the middle part of the support substrate to form a peripheral substrate and a cantilever beam structure connected with the single end of the peripheral substrate. The driving member has the advantages of having a simple process and structure, realizing the application of the antiferroelectric material in the field of the driving members for the micro actuator, and providing a completely new idea for designing and manufacturing the micro driving member with quick response and large displacement.
Description
technical field [0001] The invention relates to a driving component of a micro-actuator, in particular to a micro-cantilever beam driving component based on the field-induced phase transition strain effect of an antiferroelectric thick film. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) is a multi-disciplinary frontier research field developed by applying the latest achievements of modern information technology. The realization of highly intelligent and integrated MEMS must rely on new materials, new technologies, and new principles. , Innovative exploration and development of micro-components and micro-device systems with new effects. As the core movable part in MEMS, the micro-actuator mainly uses different energy conversion mechanisms to realize the action function of specific behaviors. It can not only constitute the power part of the micro-machine, but also become the operation or actuator of the micro-machine. The technical indicators such as t...
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IPC IPC(8): H01L41/083H10N30/50
Inventor 张文栋丑修建熊继军薛晨阳刘俊赵振宇王静牛康康
Owner ZHONGBEI UNIV