Substrate end-face grinder and grind judgment method
A grinding device and end face technology, which is applied in the direction of automatic control devices, grinding machines, grinding machine parts, etc., can solve the problem of no reflection of the depth of the grinding wheel groove, and achieve the effects of improving life, improving production performance, and reducing the number of stops
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[0045] The embodiments of the present invention will be described below based on the drawings.
[0046] Figure 4 A perspective view showing the appearance of the polishing device according to the present invention, Figure 5 Indicates the part of the grinding mechanism.
[0047] Image 6 It shows a state in which the cover 14 of the grinding wheel is removed and a cross-sectional view along the line A-A.
[0048] The grinding wheel 10 is detachably attached to the shaft 22, and is controlled by a rotation drive motor (rotation drive assembly) 20 of the grinding wheel.
[0049] The grinding wheel 10 is connected to a servo motor 30 as a cutting-in and sending-out assembly together with the rotation drive motor 20.
[0050] Such as Figure 4 As shown, in this embodiment, a pair of rotary drive motors 20a, 20b are provided, which are controlled by the positions of (X axis, Z axis), (U axis, W axis), so that they can perform simultaneous operations on both sides of the glass substrate. G...
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