Vacuum basal plate transmitting system
A technology for conveying systems and substrates, which is applied to conveyor objects, lighting and heating equipment, furnace components, etc., can solve the problems of increased pollution sources of driving mechanisms, vacuum environment pollution, scratches on substrates, etc. sheet, avoid contamination, and ensure the effect of sealing performance
Inactive Publication Date: 2012-10-10
DONGGUAN ANWELL DIGITAL MASCH CO LTD
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Problems solved by technology
In the process of transmission and processing, it is easy to cause defects such as scratches, pollution and deformation of the substrate. The synchronous contact mode inside the chamber is due to the relative movement between the sprocket and the chain or / and the synchronous pulley and the synchronous belt. And direct physical contact will increase the pollution source from the driving mechanism and bring pollution to the vacuum environment
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[0016] In order to describe the technical content and structural features of the present invention in detail, the following will be further described in conjunction with the embodiments and accompanying drawings, wherein the same reference numerals in different drawings represent the same components. Such as Figure 1-3 As shown, the present invention discloses a vacuum substrate transfer system, including a closed chamber 100 for forming a vacuum environment, a driving mechanism 200, an outer transmission mechanism 300, a sealed transmission mechanism 400, and an inner transmission mechanism 500, the driving mechanism 200 and the external transmission mechanism 300 are both arranged outside the vacuum chamber 100, the sealed transmission mechanism 400 is arranged on the side wall of the chamber 100, and the power from the external transmission mechanism 300 is transmitted through the sealed transmission mechanism 400 For the internal transmission mechanism 500, the internal t...
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The invention discloses a vacuum basal plate transmitting system comprising a vacuum chamber, a driving mechanism, two synchronously connected outer transmission mechanisms, a sealing transmission mechanism and inner transmission mechanisms. The driving mechanism and the outer transmission mechanisms are positioned outside the vacuum chamber; the sealing transmission mechanism is contained in a sealing hole positioned on the lateral wall of the vacuum chamber; the inner transmission mechanisms are distributed on the internal two sides of the vacuum chamber. The driving mechanism connected with any one of the outer transmission mechanisms synchronously drives the outer transmission mechanism. The sealing transmission mechanism is connected with the outer transmission mechanisms and the inner transmission mechanisms respectively. The inner transmission mechanisms comprise a transmission shaft and a transmitting wheel. One end of the transmission shaft is connected with the sealing transmission mechanism, while the other end of the transmission shaft is connected with the transmitting wheel. The invention transmits thin plate materials, i.e. a basal plate and the like, through the transmitting wheel so that transmission parts inside the vacuum chamber are least, the problem of the pollution of a transmission mechanism body introduced into the vacuum basal plate transmitting system is solved, and the cleanliness is greatly enhanced. The vacuum basal plate transmitting system has high cleanliness, no pollution and simple and compact structure, can stably, fast and effectively realize the synchronous transmission of the basal plate and furthest ensure the reliability of the vacuum basal plate transmitting system.
Description
technical field [0001] The invention relates to a substrate conveying mechanism, in particular to a vacuum substrate conveying system suitable for conveying substrates in a vacuum sealing system. Background technique [0002] With the rapid development of science and technology, the requirements for industrial technology are increasing day by day. Vacuum technology shows broad application prospects in the development of high-tech industrialization, especially in the digital display panel industry that requires a high vacuum environment. Thin plates such as glass substrate materials are widely used in thin-film transistor display (LCD-TFT, Liquid Crystal Display-Thin Film Transistor), organic light-emitting display device (OLED, Organic Light-Emitting Diode) panels, thin-film solar panel applications and others In the process, the chemical vapor deposition process (CVD, Chemical Vapor Deposition), physical vapor deposition process (PVD, Physical Vapor Deposition), organic sub...
Claims
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IPC IPC(8): B65G49/06H01L21/677
CPCC03B35/165C03B35/186C03B35/163H01L21/67706
Inventor 杨明生刘惠森范继良余超平王曼媛王勇
Owner DONGGUAN ANWELL DIGITAL MASCH CO LTD