Silicomethane low-temperature production and byproduct comprehensive recycling process

A technology for silicon methane and by-products, which is applied in the field of low-temperature production of silicon methane and comprehensive recovery of by-products, can solve problems such as hidden dangers of production safety, leakage, low production efficiency, etc., and achieves the effect of solving poor safety.

Active Publication Date: 2010-03-03
西安航天华威化工生物工程有限公司
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Problems solved by technology

Due to technical reasons, the existing silane production process mostly adopts small-scale intermittent operation, which is complex in operation, high in cost and low in production efficiency, and cannot meet the needs of industrial-scale production; there are also some silane production processes, although they also Larger tank reactors are used to produce silane on a large scale, but because the reaction is carried out in a liquid ammonia environment at -40°C, and the reaction is exothermic, the excess heat cannot be removed in time, resulting in low process ...

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  • Silicomethane low-temperature production and byproduct comprehensive recycling process
  • Silicomethane low-temperature production and byproduct comprehensive recycling process

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Embodiment Construction

[0021] Below in conjunction with accompanying drawing and specific embodiment, the present invention is described in detail:

[0022] Low-temperature heat exchange technology in the hopper: the coil is used to perform low-temperature heat exchange on the solid powder material entering the hopper, which can effectively reduce the heat of the material during the material addition process, thereby reducing the volatilization of liquid ammonia in the reactor;

[0023] -40°C liquid ammonia low temperature control technology: Magnesium silicide reacts with ammonium chloride to release heat. If it is not removed in time, the temperature of -40°C liquid ammonia will rise, which is not conducive to the complexation of other impurities, and a large amount of ammonia volatilization will be produced at the same time. Not conducive to subsequent silane purification. The two-stage compression refrigeration cycle that uses the ammonia pump to supply liquid passes through the jacket to exchan...

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Abstract

The invention belongs to the field of polysilicon technology, in particular to a silicomethane low-temperature production and byproduct comprehensive recycling process. Silicomethane belongs to a special gas in the past, is generally used for scientific research and has small demand. The requirement on the purity is brought forward at present along with rapid development of solar energy industry,and the demand is increased day by day. The traditional process for preparing the silicomethane with small scale has complex operation, high cost and low production efficiency, heat released form reaction can not be dispersed in time to cause lower process safety, silane and ammonia leak is generated in the process of material flow, and the environment is polluted. The invention prepares silicomethane gas through purification and carries out comprehensive recycling on byproducts generated in the production so as to realize true circulation clean production. The silicomethane low-temperature production and byproduct comprehensive recycling process realizes continuous production, and has the advantages of high degree of automation, cleanness, no leakage, safety, reliability, convenient operation and simple maintenance.

Description

technical field [0001] The invention belongs to the technical field of polysilicon, and in particular relates to a process for low-temperature production of silane and comprehensive recovery of by-products. Background technique [0002] High-purity special gas silane (SiH4) is widely used in the electronics industry, solar cells, mobile communications, car navigation, aerospace, military industry, etc. At present, my country's industrialization can only produce 3N-4N silane. In many important fields such as the electronics industry, solar cells, aerospace and other fields, most of the high-purity silane gas with a purity of 6N and above can only be imported. Due to technical reasons, the existing silane production process mostly adopts small-scale intermittent operation, which is complex in operation, high in cost and low in production efficiency, and cannot meet the needs of industrial-scale production; there are also some silane production processes, although they also La...

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Application Information

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IPC IPC(8): C01B33/04C01C1/12
Inventor 范清春郭建全杨鹏赵仕哲郭浩刘建锋尚立伟
Owner 西安航天华威化工生物工程有限公司
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