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Optical element and method for producing same

A technology for optical components and optical parts, applied in the direction of optical components, optics, polarizing components, etc., can solve the problems of reduced optical performance, low efficiency, and inability to adjust the refractive index of the adhesive

Inactive Publication Date: 2010-06-09
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, this additive is usually added during the manufacture of the adhesive, so the refractive index of the adhesive cannot be adjusted after manufacture.
Therefore, it is necessary to prepare several adhesives with different refractive indices according to the refractive index of the substrate to be bonded, which is extremely inefficient when used in industry
[0009] In addition, since it is difficult to apply the adhesive uniformly with a constant thickness, unevenness in the distance between substrates cannot be avoided.
In this case, various aberrations such as wavefront aberrations occur on the wave plate, resulting in degradation of optical performance,
[0010] In addition, since the adhesive is made of a resin material, its light resistance is low, and its refractive index changes over time, which is also a big problem when bonding optical parts.

Method used

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  • Optical element and method for producing same
  • Optical element and method for producing same
  • Optical element and method for producing same

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Experimental program
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Effect test

no. 1 approach 》

[0089] Next, the first embodiment of the manufacturing method of the optical element of the present invention will be described.

[0090] figure 1 and figure 2 It is a figure (longitudinal sectional view) for demonstrating 1st Embodiment of the manufacturing method of the optical element of this invention. Also, in the following description, the figure 1 and figure 2 The upper side is called "upper" and the lower side is called "lower".

[0091] The optical element manufacturing method of this embodiment includes the steps of preparing the first optical component 2 and the second optical component 4, and forming the bonding film 3 on the surface of the first optical component 2 by plasma polymerization (first step); A step of applying energy to the bonding film 3 (second step); a step of bonding the first optical component 2 and the second optical component 4 via the bonding film 3 to obtain a laminated optical element 5 (third step). Next, each step will be described i...

no. 2 approach 》

[0254] Next, a second embodiment of the method for manufacturing an optical element of the present invention will be described.

[0255] Figure 7 It is a figure (longitudinal sectional view) for demonstrating 2nd Embodiment of the manufacturing method of the optical element of this invention. In the description below, Figure 7 The upper side is called "upper" and the lower side is called "lower".

[0256] Next, the manufacturing method of the optical element according to the second embodiment will be described, focusing on the differences between the above-mentioned first embodiment and the first embodiment, and the description of the same matters will be omitted.

[0257] In the method of manufacturing an optical element according to this embodiment, bonding films are formed on the surfaces of the respective optical components 2 and 4, and the optical components 2 and 4 are bonded so that the bonding films are in close contact with each other. Other than that, it is the ...

Embodiment 1

[0296] First, as the first optical component, a crystal substrate with a length of 20 mm x a width of 20 mm x an average thickness of 2 mm was prepared, and as a second optical component, a crystal substrate with a length of 20 mm x a width of 20 mm x an average thickness of 1 mm was prepared. In addition, these crystal substrates have been optically polished. In addition, the crystal substrate used had a refractive index of 1.546 with respect to light having a wavelength of 546 nm.

[0297] Next, store each substrate in Figure 5 In the chamber 101 of the plasma polymerization apparatus 100 shown, the surface treatment is then performed with an oxygen plasma.

[0298] Again, a plasma-polymerized film having an average thickness of 150 nm was formed on the surface-treated surface.

[0299] In addition, the film formation conditions are as follows:

[0300]

[0301] ●Composition of raw gas: Octamethyltrisiloxane

[0302] ●Flow rate of raw material gas: 10sccm

[0303] Co...

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Abstract

An optical element includes a first optical component and a second optical component each having light transmission properties; and a bonding film bonding together the first and the second optical components. The bonding film is formed by plasma polymerization and includes an Si skeleton having a random atomic structure including a siloxane (Si-O) bond and leaving groups binding to the Si skeleton. The first and the second optical components are bonded together by the bonding film having adhesive properties provided by applying energy to at least a part of the bonding film to eliminate the leaving groups from the Si skeleton at a surface of the bonding film. Additionally, the bonding film is formed so as to have approximately the same refractive index as that of at least one of the first and the second optical components by adjusting a film forming condition of the plasma polymerization.

Description

technical field [0001] The invention relates to an optical element and a manufacturing method thereof. Background technique [0002] When joining (bonding) two members (substrates) to each other, conventional methods using epoxy-based adhesives, polyurethane-based adhesives, silica-based adhesives, and the like are often used. [0003] The adhesive can exhibit adhesiveness regardless of the material of the parts. Therefore, components made of various materials can be combined and bonded to each other in various ways. [0004] For example, a wavelength plate is known as an optical element having a function of causing a phase difference in transmitted light. The wavelength plate is made by superimposing two birefringent crystal substrates such as crystal, and bonding the substrates together with an adhesive. [0005] When bonding the substrates together using an adhesive in this way, a liquid or paste adhesive is applied to the bonding surface, and the substrates are bonded...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/30C09J7/00C09J183/04
CPCC04B2235/483C04B2237/345C04B2237/34C04B2237/341C04B37/005C04B2237/36C03C27/06G02B1/12C04B2237/062G02B5/3083
Inventor 大塚贤治松尾泰秀泽井丈德
Owner SEIKO EPSON CORP