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Image analyzer for ultraviolet OTF measuring equipment

A technology of ultraviolet transmission and image analysis, applied in the field of image analyzer, it can solve the problems of limited measurement accuracy, unselectable working spectral range, and low measurement accuracy, and achieves the effect of high sensitivity

Active Publication Date: 2010-06-16
CHINA NORTH IND NO 205 RES INST
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Problems solved by technology

However, the photoelectric image analyzer has the following problems: (1) It can only measure the visible light band; (2) The measurement accuracy is limited by the size of the CCD pixel, and the measurement accuracy will not be very high; (3) The working spectral range cannot be selected
There is currently no image analyzer that meets the above requirements

Method used

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  • Image analyzer for ultraviolet OTF measuring equipment
  • Image analyzer for ultraviolet OTF measuring equipment

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Embodiment Construction

[0012] The present invention will be further described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0013] see figure 1 , the ultraviolet image analyzer of the preferred embodiment consists of an analysis slit 1, a relay optical system 2, an optical filter, an ultraviolet photomultiplier tube 4, a lens barrel 5, a two-dimensional electric scanning platform 6 and a three-dimensional manual adjustable platform 7 composition. The analysis slit 1 is the window for scanning the test target image. In this preferred embodiment, two kinds of 5 μm and 10 μm are selected. When the light energy detected by the ultraviolet photomultiplier tube 4 is weak, the 10 μm analysis slit is selected to increase light energy passing through. Relay optical system 2 is made up of two separate positive lens groups 2-1, 2-2 and is a parallel optical path between the two positive lens groups. In this embodiment, the combination of the second positive lens g...

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Abstract

The invention discloses an image analyzer for ultraviolet OTF measuring equipment, and belongs to the field of optical metrology and test. The image analyzer mainly comprises an analysis slit, a relay optical system, an ultraviolet filter, an ultraviolet photomultiplier, and a two-dimensional electric scanning platform. During the test, the ultraviolet filter is inserted into a parallel optical path of the relay optical system; the image analyzer is driven to perform two-dimensional scanning by the two-dimensional electric scanning platform so that a tested ultraviolet optical system image an ultraviolet target at different positions of the analysis silt; after being amplified by the relay optical system and filtered by the ultraviolet filter, an ultraviolet target image on each scanning point is imaged on a photosensitive surface of the ultraviolet photomultiplier; and the ultraviolet photomultiplier converts the ultraviolet target image into an electric signal and transmits the electric signal to a control and data processing system of the ultraviolet OTF measuring equipment. The image analyzer for the ultraviolet OTF measuring equipment realizes the image analyzer required by the ultraviolet OTF measuring equipment, and has the characteristics of simple structure and high measurement accuracy.

Description

technical field [0001] The invention belongs to the field of optical metrology and photoelectric detection, and mainly relates to an ultraviolet optical system transfer function measuring instrument (abbreviated as an ultraviolet transmission instrument), in particular to an image analyzer in an ultraviolet transmission instrument. Background technique [0002] The photoelectric image analyzer is the main component of the optical parameter measuring instrument. At present, photoelectric optical parameter measuring instruments mainly include focal length meters, field of view meters, and spherical diameter meters, which are used to measure optical system parameters such as focal length, magnification, distortion, field of view, and radius of curvature. In the photoelectric optical parameter measuring instruments mentioned above, photoelectric image analyzers are generally used. Chinese patent application 200410090673.7 discloses an infinite and finite conjugate photoelectric...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02G02B5/20G02B13/16
Inventor 杨红姜昌录郭羽焦明印康文莉康登魁吴李鹏
Owner CHINA NORTH IND NO 205 RES INST
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