Multipurpose carrier of vacuum vapor deposition material and method thereof
A deposition material and phase deposition technology, applied in the direction of vacuum evaporation plating, metal material coating process, ion implantation plating, etc., to achieve the effect of reliable storage and transportation process, great convenience, and loss prevention
Active Publication Date: 2012-04-11
SECO CO LTD
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- Abstract
- Description
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- Application Information
AI Technical Summary
Problems solved by technology
[0017] The multipurpose carrier of the present invention solves the existing problems arising from porous ceramic carriers, metal powder carriers and metal felt carriers, and provides a vacuum vapor deposition carrier that offers considerable convenience and wide application
Method used
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Examples
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Effect test
example 1
[0054] Carbon fiber powder 20 and carbon fiber felt 30 are filled into container 10, then metal mesh 40 and metal gasket 50 are placed thereon to cover them, and the metal mesh and gasket are welded on the container. Therefore, a vacuum deposition material unit in which a deposition material is impregnated was manufactured by impregnating 60 mg of a liquid fluorine compound.
example 2
[0056] The vacuum vapor deposition material unit manufactured in Example 1 was charged in the electron beam port of the vacuum deposition apparatus. The vacuum degree of the vacuum vapor deposition equipment is 5×10 -5 In the case of torr and beam current of 20 mA, the diameter of the electron beam was set to 30 mm. Vacuum vapor deposition materials are coated onto glass, PMMA, PC and PET panels.
example 3
[0058] The vacuum vapor deposition material unit manufactured in Example 1 is charged in the molybdenum heating unit ship of the vacuum vapor deposition equipment, and at an electric current of 50mA and a vacuum degree of 5×10 -5 torr is coated onto glass, PMMA, PC and PET panels.
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Abstract
The present invention relates to a multipurpose carrier for vacuum vapor deposition material and manufacturing method thereof. A multipurpose carrier for vacuum vapor deposition materials of the present invention comprises: an outer container made of metallic materials such as stainless steel, iron, copper, molybdenum, tungsten, or titanium etc.; an inner filler such as carbon fiber felt, carbon fiber or metal felt, etc.; and a mesh and a washer which are disposed thereon and are made of metallic materials such as stainless steel, iron, copper, molybdenum, tungsten, or titanium etc., wherein these elements are assembled or welded as a securely-integrated structure. The technical feature of the present invention is that various types of deposition materials with various functions, which are impregnated or filled in a multipurpose carrier of the present invention, can be uniformly deposited as a very thin-film by an electron-beam heating method or a resistance heating method in a vacuumvapor deposition device, wherein the deposition material is composed of organic and / or inorganic compounds which has a solid state such as powder and particle, a liquid state having various viscosity, and a semi-solid state such as slurry.
Description
technical field [0001] The object of the present invention is that various types of deposition materials impregnated or filled into the multipurpose carrier of the present invention can be uniformly deposited by electron beam heating or resistance heating in vacuum vapor deposition equipment, wherein the deposition materials are made of organic and / or Or composed of inorganic compounds, which have solid state (such as powder and granular), liquid with different viscosities, and semi-solid state (such as slurry). Background technique [0002] The multipurpose carrier for vacuum vapor deposition materials of the present invention includes: an outer container made of metal materials such as stainless steel, iron, copper, molybdenum, tungsten or titanium; an inner filler such as carbon fiber felt , carbon fiber or metal felt, etc.; and meshes and gaskets placed thereon and made of metallic materials such as stainless steel, iron, copper, molybdenum, tungsten, or titanium, wherei...
Claims
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IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/08C23C14/12C23C14/14C23C14/24
Inventor 金炫中金洪彻金正来
Owner SECO CO LTD