Laminated piezoelectric element and jetting apparatus using same
A piezoelectric element, layered technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive devices, fuel injection devices, etc. Changes in displacement, cracks and other problems, to achieve the effect of suppressing changes in displacement, stress concentration, and cracks
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no. 1 approach
[0042] A multi-layer piezoelectric element according to an embodiment of the present invention will be described in detail with reference to the drawings. figure 1 (a) is a perspective view showing the multi-layer piezoelectric element according to the present embodiment, figure 1 (b) is a partial perspective view showing a stacked state of piezoelectric layers and metal layers in the multi-layer piezoelectric element. figure 2 It is a cross-sectional view of the laminated structure of the metal layer in contact with the laminated body layer of the laminated piezoelectric element according to the first embodiment.
[0043] like figure 1 As shown, the multilayer piezoelectric element has a laminate 13 in which piezoelectric layers 11 and metal layers 12 are alternately laminated, and a pair of external electrodes 15 are bonded to each other. The end portion of the metal layer 12 exposed on the side surface is electrically connected. Inactive layers 14 formed of piezoelec...
no. 2 approach
[0090] The multi-layer piezoelectric element according to the second embodiment of the present invention will be described in detail. image 3 (a) is a perspective view showing the multi-layer piezoelectric element according to the present embodiment, image 3 (b) is image 3 Partial perspective view of the laminated state of the piezoelectric layer and the metal layer in (a).
[0091] like image 3 As shown in (a) and (b), the multi-layer piezoelectric element of this embodiment has a structure in which a plurality of piezoelectric layers 21 and a plurality of metal layers 22a and 22b (hereinafter collectively referred to as "metal layers 22") are alternately stacked. The laminated body 23 is provided with a pair of external electrodes 25 (one external electrode is not shown) on opposing side surfaces of the laminated body 23 . Each metal layer 22 is not formed on the entire main surface of the piezoelectric layer 21, ie, constitutes a so-called partial electrode structure...
Embodiment 1
[0123] (Example 1) A piezoelectric actuator comprising the multi-layer piezoelectric element of the present invention was fabricated as follows.
[0124] First, mix lead zirconate titanate (PbZrO 3 -PbTiO 3 ) as main components of piezoelectric ceramic calcined powder, binder, and plasticizer to prepare a slurry, and to fabricate a ceramic printed circuit board as a piezoelectric body 11 with a thickness of 150 μm by doctor blade method or the like.
[0125] On one surface of this ceramic printed circuit board, a conductive paste with a binder added to a silver-palladium alloy (95% by mass of silver-5% by mass of palladium) was printed by screen printing. At this time, in the part where the other metal layer 12B is formed, a conductive paste with a binder added to a silver-palladium alloy (silver 95% by mass-palladium 5% by mass) is used for printing so that it becomes 5 or 10 μm after firing. thickness. Also, in some cases, 0.2 μm acrylic particles are added to the conduct...
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