Double-layer crucible for growing silicon single crystals by directional solidification method
A double-layer crucible, directional solidification technology, applied in the direction of self-solidification, crystal growth, single crystal growth, etc., can solve problems such as leakage of silicon melt, and achieve the effect of improving performance, avoiding leakage and low cost
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Embodiment 1
[0036] Such as figure 2 The shown double-layer crucible for growing silicon single crystal by directional solidification method includes an outer crucible and an inner crucible, and the inner crucible is nested inside the outer crucible.
[0037] Among them, the outer crucible is made of CFC (carbon-carbon composite) material, including the outer crucible body 2 and the outer crucible bottom 4. The outer crucible bottom 4 is processed with an anti-leakage agent 6 between the inner and outer walls. The leak-proof cavity. The anti-leakage agent 6 uses high-purity tin with a purity of over 99.99%. The anti-leakage agent 6 is liquid when the temperature is higher than 232°C, has a density of about 7.3g / cm3, and does not react with silicon and is immiscible even at high temperatures (1000-2000°C).
[0038] The inner crucible is made of quartz material, including a quartz inner crucible body 1, a quartz seed crystal sleeve 7, and a quartz inner crucible bottom 3, where the inner crucib...
Embodiment 2
[0045] In the same way as in Example 1, the difference is that BaF with a mass ratio of 1:1 2 And BaCl 2 The mixture (in powder form) is used as an anti-leakage agent 6. BaF 2 The melting point is 1360℃ and the density is 4.89g / cm 3 . BaCl 2 The melting point is 962℃ and the density is 3.1g / cm 3 . Therefore, BaF with a mass ratio of 1:1 is used 2 And BaCl 2 The density of the mixture is greater than that of silicon (2.33g / cm3), and the melting point is lower than that of silicon (1415°C). At the same time, BaF 2 And BaCl 2 The melt does not react with or dissolve in silicon melt between 1400°C and 2000°C.
Embodiment 3
[0047] In the same manner as in Example 1, the difference is that the cross-sectional areas of the inner crucible body 1 and the outer crucible body 2 are square.
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