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572 results about "Thermoplastic polyimide" patented technology

Thermoplastic Polyimide (PI) Thermoplastic PI is a thermoplastic, further classified an an imide plastic. It can have a moderately high tensile strength among the thermoplastics in the database. The properties of thermoplastic PI include three common variations. This page shows summary ranges across all of them.

Electrostatic chucking device and manufacturing method thereof

The present invention discloses an electrostatic chucking device having a laminated structure which is formed by sequentially laminating a first insulation layer, an electrode layer and a second insulation layer on metal substrate, wherein the first insulation layer and the second insulation layer are constituted of polyimide films, and at least the adhesion between the metal substrate and the first insulation layer, and, preferably, further, the adhesions including the adhesion between the first insulation layer and the electrode layer and the adhesion between the electrode layer and the second insulation layer are performed by using thermoplastic polyimide-based adhesive films having a film thickness of 5 to 50 mum. Further, to manufacture the electrostatic chucking devices having such a constitution, the present invention also discloses an electrostatic chucking device manufacturing method which performs the low-temperature compression bonding processing under pressure at a temperature of 100 to 250° C. between the metal substrate and the first insulation layer, between the first insulation layer and the electrode layer, and between the electrode layer and the second insulation layer using thermoplasticpolyimide-based adhesion films. According to the present invention, the electrostatic chucking device can exhibit the excellent attraction performance over a long period while ensuring the excellent durability and the excellent heat resistance. Further, the method can manufacture the electrostatic chucking devices which do not contaminate a periphery of the device and a wafer.
Owner:CREATIVE TECH CORP

Two-layer-process double-sided flexible copper-clad laminate (CCL) and manufacture method thereof

The invention relates to a two-layer-process double-sided flexible copper-clad laminate (CCL) and a manufacture method thereof. The two-layer-process double-sided flexible CCL comprises an upper copper foil, a lower copper foil and three polyimide resin layers sequentially clamped between the two copper foils, i.e. a thermoplastic polyimide resin layer with a thermal expansion coefficient larger than 40 ppm / DEG C, a thermoset polyimide resin layer with a low thermal expansion coefficient of 0-20 ppm / DEG C and a thermoset polyimide resin layer with a high thermal expansion coefficient of 20-40 ppm / DEG C. The two-layer-process double-sided flexible provided by the invention has higher thermal stability and high moisture fastness and can still have excellent high thermal stability, favorable size stability and high stripping strength under the harsh environment of high temperature, high moisture, and the like, thereby having favorable industrial prosperities. The double-sided flexible CCL manufactured by the invention has practically improved size stability under the condition of heavy moisture. When being applied to the environment of high temperature, high moisture, and the like, the double-sided flexible CCL and printing circuits made by the same have excellent thermal stability, high temperature reliability and moisture fastness stability.
Owner:GUANGDONG SHENGYI SCI TECH
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