The invention provides a preparation method of a high-purity dense
magnesium oxide target material based on rapid
surface heat treatment. The method comprises the following steps: taking
magnesium oxide powder as the
raw material, taking
zirconium oxide spheres as media, carrying out planetary ball milling of the
raw material, and sieving the milled
powder via a 200-mesh
sieve; carrying out cold isostatic pressing of the sieved
powder to obtain a
magnesium oxide pressed blank;
sintering the magnesium oxide pressed blank in vacuum, carrying out surface precision
machining of the target material according to the needed target material size till the
surface roughness of the target material is less than or equal to 0.8 micron after
vacuum sintering is ended to obtain a magnesium oxide target material; and
grinding the surface of the magnesium oxide target material, then washing and finally carrying out rapid
surface heat treatment under the vacuum condition by using a
continuous wave laser heat treatment method, a scanning
electron beam method or a non-coherent
wideband frequency
light source method to obtain the high-purity dense magnesium oxide target material based on rapid
surface heat treatment. The magnesium oxide target material prepared by the method is high in purity, high in density and consistent in
surface layer structures and inner layer structures; and the preparation method is simple, green, environmentally-friendly and energy-saving, and is short in preparation time.