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37results about How to "Eliminate dislocations" patented technology

Tray capable of eliminating warping of wafers

InactiveCN104538333AStable and reliable temperature fieldStable and reliable flow fieldSemiconductor/solid-state device manufacturingLattice mismatchEngineering
The invention discloses a tray capable of eliminating warping of wafers. The tray comprises a base body and bases, a plurality of concave pits are formed in one side face of the base body, and one base is arranged in each concave pit. The bases are embedded in the corresponding concave pits, gaps are kept between the bases and the bottoms of the concave pits, and the overall height of the bases is smaller than the depth of the concave pits. A plurality of air suction holes are formed in the upper surfaces of the bases, and after the wafers are sucked on the bases, the overall combined height of the wafers and the bases is smaller than the depth of the concave pits. A vacuumizing channel communicated with the air suction holes is formed in each base, and the vacuumizing channels penetrate through the lower surfaces of the bases. Air exhaust holes are formed in the bottoms of the concave pits, a vacuumizing channel communicated with the air exhaust holes is formed in the base body, and the vacuumizing channel penetrates through the other side face of the base body and can be connected with an outside vacuumizing device. According to the tray, the wafers can be flatly attached to the bases, the epitaxial wafer warping problem caused by thermal mismatch and lattice mismatch can be effectively solved, the temperature in the wafers is uniform, and the subsequent technology processes are facilitated.
Owner:REDSOLAR NEW ENERGY TECH

Double-layer crucible for growing silicon single crystals by directional solidification method

The invention discloses a double-layer crucible for growing silicon single crystals by a directional solidification method, which comprises an outer crucible and an inner crucible nested into the outer crucible, wherein the inner crucible comprises an inner crucible main body and an inner crucible bottom; the outer crucible comprises an outer crucible main body and an outer crucible bottom; the inner crucible bottom is provided with a seed crystal sleeve for placing seed crystals; the outer crucible bottom is provided with an anti-leakage cavity; an anti-leakage agent is placed in the anti-leakage cavity; and the internal cavity of the inner crucible main body is communicated with the anti-leakage cavity through the internal cavity of the seed crystal sleeve. The anti-leakage agent is not reacted with silicon and is immiscible with the silicon, the density of the anti-leakage agent is more than 2.4g/cm<3>, and the melting temperature of the anti-leakage agent is less than 1,410 DEG C. The double-layer crucible can effectively solve the seed crystal placing problem, realizes silicon single crystal growth by the directional solidification method, meanwhile can furthest prevent molten silicon from leaking from the seed crystal sleeve, has low cost and a simple structure, and is easy to process.
Owner:GREENERGY CRYSTAL TECH

Secondary hot-extrusion technology of AQ80M magnesium alloy profiles

The invention discloses a secondary hot-extrusion technology of AQ80M magnesium alloy profiles. The secondary hot-extrusion technology comprises the steps: 1) performing double-stage homogenizing treatment to magnesium alloy billets after peeling; 2) heating the magnesium alloy billets to 340-420 DEG C after double-stage homogenizing pretreatment, holding the magnesium alloy billets for 1-3 h at 340-420 DEG C, performing primary hot-extrusion deformation at the extrusion ratio of 2:9 and the extrusion speed of 1.5-6 mm/s to obtain bars; 3) heating the magnesium alloy bars obtained in 3) to 340-380 DEG C, holding the magnesium alloy bars for 1-3 h at 340-380 DEG C, performing secondary hot-extrusion deformation at the extrusion ratio of 12:15 and the extrusion speed of 4-12 mm/s to obtain magnesium alloy triangular profiles; 4) performing thermal treatment to the magnesium alloy triangular profiles obtained in 3) to obtain final products. According to the secondary hot-extrusion technology disclosed by the invention, the triangular profiles with the circumscribed circle diameter of 95-108 mm and the length of at least 5000 mm can be obtained, the high-temperature tensile strength of the magnesium alloy triangular profiles after thermal treatment is >= 250 MPa, the yield strength is >= 195 MPa, and the elongation is >= 23%.
Owner:HUNAN JINGE NEW MATERIAL

Preparation method of high-purity dense magnesium oxide target material based on rapid surface heat treatment

The invention provides a preparation method of a high-purity dense magnesium oxide target material based on rapid surface heat treatment. The method comprises the following steps: taking magnesium oxide powder as the raw material, taking zirconium oxide spheres as media, carrying out planetary ball milling of the raw material, and sieving the milled powder via a 200-mesh sieve; carrying out cold isostatic pressing of the sieved powder to obtain a magnesium oxide pressed blank; sintering the magnesium oxide pressed blank in vacuum, carrying out surface precision machining of the target material according to the needed target material size till the surface roughness of the target material is less than or equal to 0.8 micron after vacuum sintering is ended to obtain a magnesium oxide target material; and grinding the surface of the magnesium oxide target material, then washing and finally carrying out rapid surface heat treatment under the vacuum condition by using a continuous wave laser heat treatment method, a scanning electron beam method or a non-coherent wideband frequency light source method to obtain the high-purity dense magnesium oxide target material based on rapid surface heat treatment. The magnesium oxide target material prepared by the method is high in purity, high in density and consistent in surface layer structures and inner layer structures; and the preparation method is simple, green, environmentally-friendly and energy-saving, and is short in preparation time.
Owner:DONGGUAN JIAQIAN NEW MATERIAL TECH CO LTD

A seeding method for growing sapphire crystals by Kyropoulos method

The invention relates to a seeding method for growth of sapphire crystal with a KY (Kyropoulos) method. A non-rotating symmetric structure of a radiation heat dissipation opening of seed crystal is used, and the seeding method comprises following steps during seeding: (1), the seed crystal is immersed 3-5 mm below the liquid level of melt; (2), a crystal plate grows out from the seed crystal preferentially towards one side after the heat dissipation opening adopting the non-rotating symmetric structure dissipates heat; (3), the seed crystal is lifted and pulled at an average lifting and pulling speed being 3-12 mm / h, alternate instant lifting is adopted in the lifting and pulling process, the seed crystal is rotated by a given angle, and a crystal plate grows out again in the heat dissipation direction after alternate instant lifting, so that next instant lifting is facilitated; (4), the step (3) is carried out repeatedly until the length of a crystal section reaches 60-80 mm, the crystal section adopting a spiral structure is formed, and when the equivalent diameter of the cross section of a solid-liquid interface reaches 40-60 mm, seeding is finished. The seeding method has the advantages as follows: the spiral seeding structure can be obtained, defects and dislocation of the seed crystal can be eliminated to the largest extent, breaking cannot be caused easily, the yield of crystal can be increased, and industrial production is facilitated.
Owner:JIANGSU CEC ZHENHUA CRYSTAL TECH

A seed crystal preparation method and laying method for ingot single crystal

ActiveCN112519014BReduce the possibilityThe probability of occurrence of dislocations is lowBy pulling from meltFine working devicesSingle crystal growthDislocation
The invention discloses a method for preparing a seed crystal for ingot single crystal and a laying method thereof. It specifically includes the following steps: in the seed crystal growth stage, firstly determine the crystal direction corresponding to the crystal growth direction, and perform vertical growth along the determined crystal growth direction, and adopt the preparation method of dislocation-free single crystal to carry out, the seed The crystal grows into a rod; in the seed crystal processing stage, the seed crystal rod must first be cut into a bar with a square cross-section along the growth direction of the seed crystal corresponding to the crystal direction; after the rod is cut, the seed crystal is cut into a seed crystal After the block is cut, the seed crystal block is ground, chamfered, and then washed with alkali to eliminate the damaged layer on the surface of the seed crystal during processing. The beneficial effects of the present invention are: polycrystalline nucleation will not occur, and the possibility of polycrystalline nucleation of cast single crystals is eliminated from the source; 50% of dislocations in seed crystals can be eliminated, and during the entire growth process of single crystals In this way, the probability of dislocation generation can be minimized.
Owner:史珺

Double-layer crucible for growing silicon single crystals by directional solidification method

The invention discloses a double-layer crucible for growing silicon single crystals by a directional solidification method, which comprises an outer crucible and an inner crucible nested into the outer crucible, wherein the inner crucible comprises an inner crucible main body and an inner crucible bottom; the outer crucible comprises an outer crucible main body and an outer crucible bottom; the inner crucible bottom is provided with a seed crystal sleeve for placing seed crystals; the outer crucible bottom is provided with an anti-leakage cavity; an anti-leakage agent is placed in the anti-leakage cavity; and the internal cavity of the inner crucible main body is communicated with the anti-leakage cavity through the internal cavity of the seed crystal sleeve. The anti-leakage agent is notreacted with silicon and is immiscible with the silicon, the density of the anti-leakage agent is more than 2.4g / cm<3>, and the melting temperature of the anti-leakage agent is less than 1,410 DEG C.The double-layer crucible can effectively solve the seed crystal placing problem, realizes silicon single crystal growth by the directional solidification method, meanwhile can furthest prevent molten silicon from leaking from the seed crystal sleeve, has low cost and a simple structure, and is easy to process.
Owner:GREENERGY CRYSTAL TECH

Seeding mold for growing silicon crystals by using orientated solidification method and crystal growing method

The invention discloses a seeding mold for growing silicon crystals by using an orientated solidification method and a crystal growing method. The seeding mold is arranged at the internal bottom of a quartz crucible and comprises a seed crystal container and a sealing liquid container, wherein the sealing liquid container consists of cavities connected to the periphery of the seed crystal container and is used for accommodating a sealing substance; and the seed crystal container is provided with a first cavity for accommodating seed crystals. A method for growing monocrystalline silicon / similar monocrystalline silicon by adopting the seeding mold comprises the following steps of: arranging or setting the seeding mold at the bottom of the quartz crucible; arranging the sealing substance and the seed crystals in the sealing liquid container and the seed crystal container respectively; putting a silicon raw material into the quartz crucible; and growing monocrystals / similar monocrystals by adopting orientated solidification. By adopting the seeding mold and the crystal growing method, the problem of placement of the seed crystals can be solved without changing the structures of the conventional orientated solidification and quartz crucible, dislocation of the seed crystals in the seeding process is eliminated, and the spontaneous nucleation phenomenon of melt from the bottom wallface of the crucible is avoided. The seeding mold has low cost and is easy to process.
Owner:GREENERGY CRYSTAL TECH

Process integration method for integrating high-voltage CMOS (complementary metal oxide semiconductor) in logic process

The invention discloses a process integration method for integrating a high-voltage CMOS (Complementary Metal Oxide Semiconductor) in a logic process. The process integration method comprises the following steps of: 1, forming a first channel region of the high-voltage CMOS; step 2, forming a first drift region of the high-voltage CMOS; step 3, carrying out primary furnace tube hot drive-in; 4, forming a high-voltage gate oxide layer by adopting a first thermal oxidation process; 5, forming shallow trench isolation, wherein the depth of the first shallow trench isolation in the formation region of the high-voltage CMOS is smaller than that of the second shallow trench isolation in the formation region of the logic device; 6, completing a process before the formation process of the gate conductive material layer in the formation region of the logic device, and then forming the gate conductive material layer; and step 7, performing heavily doped source-drain injection of the first conductive type. According to the invention, the stress generated by the thermal process required by the high-voltage CMOS on the active region can be eliminated, so that the defects of the active region caused by the stress are eliminated, and the quality of the high-voltage gate oxide layer and the performance of the high-voltage CMOS are improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

A method for improving the thermal conductivity of magnesium-based composite materials with nano-diamond and magnesium-based composite materials

The invention discloses a method for improving thermal conductivity of a magnesium-based composite material by nano diamond and the magnesium-based composite material. The preparation method comprisesthe steps of firstly, uniformly dispersing the nano diamond in a magnesium alloy matrix by an ultrasonic dispersion method, sintering ball-milled powder in a vacuum hot-pressing sintering furnace toobtain a sintered blank, increasing diamond activity at a nano level by high-temperature and high-pressure treatment, and further forming a layer of carbide between the nano diamond and the magnesiumalloy matrix. Therefore, the interface bonding strength is improved, interface defects are reduced, and the interface thermal conductivity is improved. The preparation method is simple to operate andeasy to realize, and the slight carbonization reaction between the nano diamond and the magnesium alloy matrix is realized through high temperature and high pressure. The magnesium-based composite material prepared by the method has the advantages that on one hand, the diamond particle reinforced magnesium-based composite material obtains high thermal conductivity, has low thermal expansion coefficient matched with a semiconductor material, and has good application prospects.
Owner:QINGHAI UNIVERSITY
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