Multifunctional detection chip for optical fiber sensor, and manufacturing and packaging method for optical fiber sensor
An optical fiber sensor and packaging method technology, which is applied in measurement devices, instruments, scientific instruments, etc., can solve the problems such as the inability to integrate the optical fiber sensing detection system and the microfluidic chip, the inability to realize the packaging of the optical fiber sensor, and the inability to realize automatic detection. , to prevent external pollutants from entering the sensing system, improve stability and automation, and avoid inaccurate measurement results.
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specific Embodiment approach 1
[0032] Specific implementation mode 1. Combination figure 1 Description of this embodiment, the multi-functional detection chip used for optical fiber sensors consists of etching a plurality of square steps 1, a sample pool 2, a fixed groove 3, a liquid inlet 4, a connecting microchannel 5, and a first circular shape on a silicon chip. groove 6, the second circular groove 7 and the third circular groove 8, the square step 1 is fixed in the sample pool 2, the two ends of the sample pool 2 are respectively connected with the fixed groove 3, the sample pool Liquid inlet 4 is set on one side of 2; the other side of sample pool 2 is connected with first circular groove 6 by connecting microchannel 5; Shaped groove 8 connection.
specific Embodiment approach 2
[0033] Specific embodiment two, be used for the manufacture method of the multifunctional detection chip of optical fiber sensor, this method is realized by the following steps:
[0034] Step 1, sputtering a layer of aluminum mask on the surface polished silicon wafer;
[0035] Step 2, apply glue on the aluminum mask described in step 1, photolithography sample pool 2, fixed groove 3, liquid inlet 4, connecting microchannel 5, first circular groove 6, second circular concave The figure of the groove 7 and the third circular groove 8, the sample pool 2, the fixed groove 3, the liquid inlet 4, the connecting microchannel 5 and the first circular groove 6, the second circular groove 7 are obtained after developing and the photoresist layer of the third circular groove 8;
[0036] Step 3, using phosphoric acid to corrode the aluminum mask that is not protected by the photoresist layer in step 2; then remove the sample pool 2, fixed groove 3, liquid inlet 4, connecting microchanne...
specific Embodiment approach 3
[0053] Specific embodiment three, combine Figure 7 Describe this embodiment, the difference between this embodiment and specific embodiment 1 or 2 is that this embodiment is the process of automatic sampling of the detection chip:
[0054] Before the detection chip is used, the first microcavity 16, the second microcavity 17 and the third microcavity 18 are all in a compressed state.
[0055] The first step: connect the upper end of the liquid inlet pipe 19 with the calibration pool 21 on the microfluidic chip 20, release the third microcavity 18, and draw the calibration liquid into the detection chip for calibration;
[0056] Second step: after the calibration of the first step, the upper end of the liquid inlet pipe 19 is separated from the microfluidic chip 20, and then the second microcavity 17 is released, and the calibration solution is sucked into the second microfluidic chip from the detection chip. inside chamber 17;
[0057] Step 3: Connect the upper end of the l...
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