Precise positioning and sputtering-coating mechanical arm and positioning method thereof

Abstract

The invention discloses a precise positioning and sputtering-coating mechanical arm, comprising a motor and a motor sleeve arm connected with the motor; the motor drives the motor sleeve arm to rotate; four sides of the motor sleeve are distributed with air cylinder blocks at equal diameter and equal distance; each air cylinder block is provided with an air cylinder; the piston rod of the air cylinder is vertically installed; the piston rod is detachably provided with a cover plate having a vacuum suction nozzle and used for placing light disk; the mechanical arm further comprises a positioning clamp for positioning the mounting position of the cover plate; the positioning clamp comprises a base; the center of the base is provided with a mounting hole; the housing of the motor is installed in the mounting hole of the positioning clamp; the base is provided with a station hole corresponding to the cover plate; the station hole is distributed at equal diameter and equal distance using the mounting hole as the center; the cover plate is installed in the station hole correspondingly to position the mounting position of the cover plate. The sputtering-coating mechanical arm greatly improves the production efficiency of light disk production line and simultaneously ensures low production cost; besides, the invention further discloses a positioning method.

Description

technical field [0001] The invention relates to a precise positioning sputtering manipulator and a positioning method thereof, in particular to a positioning fixture for improving the asymmetry problem of a sputtering manipulator arm of a sputtering unit in a CD production line and a method for using the positioning fixture. Background technique [0002] The optical storage medium has developed from CD to DVD, and now to BD Blu-ray disc. In order to increase the stored information capacity, the size of the information record must be continuously reduced, which requires that the wavelength of the used reading and recording light waves must be gradually shortened. The numerical aperture (NA) value of the reading objective lens is constantly increasing, so the wavelength used by the optical storage medium (disc) is from 780nm of CD to 650nm of DVD, and the blue laser with a wavelength of 405nm is used when developing to BD Blu-ray disc. The numerical aperture NA value of the ob...

AI Technical Summary

Problems solved by technology

Although the existing visual inspection technology is simple, it completely depends on the operator's technical level, and it is difficult to guarantee the effect of the cover plate adjustment.

During the debugging process of the sputtering manipulator, the level adjustment of the cover plate can basically be completed by using the height gauge, but the symmetry of the cover plate cannot be guaranteed

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