Infrared spectrum type MEMES gas sensitive sensor based on filter structure light splitting

A technology of gas sensor and infrared spectrum, applied in the field of gas sensor, can solve the problems of weak anti-interference ability, difficult miniaturization, difficult processing, etc., achieve high sensitivity, stable performance, and overcome the effect of low anti-interference ability

Active Publication Date: 2010-12-22
新疆中科丝路物联科技有限公司
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Problems solved by technology

[0005] In order to solve the problems of low sensitivity, weak anti-interference ability, difficult processing, and difficulty in miniaturization of existing gas sensors, the present invention provides an infrared spectrum MEMES gas sensor based on filter structure spectroscopy to meet people's needs for high-precision gas sensors. analysis requirements

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  • Infrared spectrum type MEMES gas sensitive sensor based on filter structure light splitting
  • Infrared spectrum type MEMES gas sensitive sensor based on filter structure light splitting
  • Infrared spectrum type MEMES gas sensitive sensor based on filter structure light splitting

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Embodiment Construction

[0030] In order to make the purpose of the present invention, technical solutions and advantages clearer, the following in conjunction with the analysis of chloroform (chloroform) vapor in the ambient gas is a specific example, and with reference to the accompanying drawings, the present invention is further described in detail.

[0031] Such as figure 1 as shown, figure 1 It is a schematic diagram of the planar structure of the infrared spectroscopic MEMS gas sensor based on the filter structure spectroscopy provided by the present invention. The sensor uses the infrared transmission information of the gas to detect the gas, judges the gas type through the position of the characteristic peak, and determines the gas content through the absorbance of the characteristic wavelength, which effectively solves the problem of low sensitivity of the existing gas sensor, limited detection of gas types, and low anti-interference ability The problem. Moreover, the fabrication of the se...

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Abstract

The invention discloses an infrared spectrum type MEMES gas sensitive sensor based on filter structure light splitting which analyzes the infrared absorption spectrum of a gas to determine the component and concentration of the gas. The gas sensitive sensor comprises an infrared light supply (1), an analysis air chamber (2), a photonic crystal filter (3) and an infrared light intensity detection array (4) which are integrated on a silicon substrate. The sensor utilizes the infrared transmittance information of gas to detect gas, the positions of characteristic peaks to judge the category of gas and the absorbances of the specific wavelengths to determine the content of gas, thus effectively solving the problems that the existing gas sensitive sensor has low sensitivity, the categories of the detected gas are limited and the anti-interference ability of the gas sensitive sensor is low. In addition, the preparation method of the sensor of the invention and the CMOS technology are compatible, thus the sensor is easy to integrate, the cost is reduced and the promotion and application of the sensor are facilitated.

Description

technical field [0001] The invention relates to a gas sensor, in particular to an infrared spectrum MEMES gas sensor based on filter structure light separation. Background technique [0002] Gas sensors are indispensable tools in many fields such as pharmaceuticals, chemicals, food, customs, coal mines, medical testing, and environmental monitoring. However, traditional gas sensors are large in size, high in power consumption, low in sensitivity, and poor in performance consistency. Inconvenient and difficult to popularize; MEMS-based gas sensor has small size, low power consumption, good performance consistency and easy to use. However, most MEMS gas sensors based on sensitive membranes use the selective adsorption between the sensitive membrane and the target gas to cause changes in electrical parameters such as resistance and capacitance of the sensitive membrane or mechanical parameters such as vibration frequency to achieve gas detection. The types of gases that this t...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/35B81B7/02G01N21/3504
Inventor 景玉鹏高超群
Owner 新疆中科丝路物联科技有限公司
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