Four-point equal ratio light splitting device and laser marking machine with the device

Abstract

The invention discloses a four-point equal-ratio spectroscopic device, which includes a first reflective mirror and a second reflective mirror with a reflectivity of 100%; a first spectroscopic mirror, a second spectroscopic mirror with a reflectivity of 50%, and a The third beam splitter; the first focusing mirror, the second focusing mirror, the third focusing mirror and the fourth focusing mirror; the first beam splitting mirror, the third beam splitting mirror, and the first reflecting mirror are placed in parallel with each other and sequentially placed on the incident collimated beam On the same straight line where the collimated beam passes through the quadrant beam system, four beams of first, second, third and fourth beams whose power is 25% of the collimated beam are formed. The four-point splitting device has few optical elements, saves space and reduces the loss of light energy; the reflectivity of the first beam splitter, the second beam splitter, and the third beam splitter are all 50%, and finally four beams with equal power are formed. The light that accounts for 25% of the energy of the collimated beam has uniform energy, which is conducive to drawing higher-quality lines.

Description

technical field [0001] The invention relates to the field of optics, in particular to a quarter-and-equal ratio light splitting device and a laser marking machine with the device. Background technique [0002] In the current solar cell laser scribing process, there is a process using a single laser and a single optical path for processing, and there is also a process for processing with a single laser and multiple optical paths. For example, the common method of splitting one laser beam into four laser beams. [0003] However, in the prior art, the beam splitting method of dividing one laser beam into four laser beams is a method of horizontal beam splitting or proportional beam splitting. [0004] Horizontal beam splitting technology: The laser plane is arranged horizontally, the lens centers of beam splitters, reflectors and other components are all arranged on the same horizontal plane, and the laser light path remains on the horizontal plane to complete light transmissi...

AI Technical Summary

Problems solved by technology

Although the proportional beam splitting technology saves space, due to the large deviation range of the ratio between the reflected power and the transmitted power of the beam splitter, the optical power distribution of each channel is unbalanced

Images