Unlock instant, AI-driven research and patent intelligence for your innovation.

Vapor generator and vapor deposition apparatus

An evaporation and vapor technology, which is applied in lighting devices, vacuum evaporation plating, and devices for coating liquids on surfaces, etc., can solve the problems of deterioration of organic thin films, deterioration of organic evaporation materials, etc., and achieve good film quality. Effect

Active Publication Date: 2013-07-17
ULVAC INC
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, compared with the initial state, the organic vapor deposition material 200 deteriorates, and the film quality of the organic thin film deteriorates.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Vapor generator and vapor deposition apparatus
  • Vapor generator and vapor deposition apparatus
  • Vapor generator and vapor deposition apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0032] figure 1 Symbol 1 in represents an example of the manufacturing apparatus of the present invention for manufacturing an organic electroluminescence element. The manufacturing apparatus 1 has a transfer chamber 2 , one or more vapor deposition apparatuses 10 a to 10 c , a sputtering chamber 7 , loading and unloading chambers 3 a and 3 b , and processing chambers 6 and 8 . The respective vapor deposition devices 10a to 10c, the sputtering chamber 7, the loading and unloading chambers 3a and 3b, and the processing chambers 6 and 8 are connected to the transfer chamber 2, respectively.

[0033] A vacuum exhaust system 9 is connected to the transfer chamber 2 , the vapor deposition devices 10 a to 10 c , the sputtering chamber 7 , the loading and unloading chambers 3 a and 3 b , and the processing chambers 6 and 8 . The vacuum exhaust system 9 creates a vacuum atmosphere inside the transfer chamber 2, the vapor deposition apparatuses 10a to 10c, the processing chambers 6 a...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

An organic thin film having excellent film quality is formed. A vapor generator of the present invention has an evaporation chamber, a dispense head and a tank. A vapor deposition material is in the liquid state, stored in the tank, and fed to the dispense head from the tank. The dispense head dispenses the vapor deposition material fed inside thereof from a dispense orifice and disposes the vapor deposition material on a heating member inside the evaporation chamber. The dispense head accurately feeds the vapor deposition material by a required amount. Because only the required amount of the vapor deposition material is heated, an organic thin film excellent in film quality is formed without deterioration.

Description

technical field [0001] The present invention relates to a vapor generator and a vapor deposition device using the vapor generator. Background technique [0002] Organic electroluminescent (EL) elements are one of the most attention-grabbing display components in recent years, with excellent characteristics of high brightness and fast response. The organic electroluminescent element has a light emitting region that emits three different colors of red, green, and blue on a glass substrate. The light-emitting region is the anode electrode film, hole injection layer, hole transport layer, light-emitting layer, electron transport layer, electron injection layer and cathode electrode film stacked in this order, and red, Green or blue color. [0003] The hole transport layer, the light emitting layer, the electron transport layer, etc. are generally composed of organic materials, and a vapor deposition apparatus is widely used to form a film of such an organic material. [0004]...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/50H05B33/10C23C14/24
CPCC23C14/243H01L51/001C23C14/12B05D1/60H10K71/164
Inventor 根岸敏夫
Owner ULVAC INC