Conductive polymer composition, coated article, and patterning process

A conductive polymer and composition technology, applied in the direction of conductive materials, conductive materials, conductive coatings, etc., can solve the problems of uneven liquid quality and difficulty in changing, and achieve the effect of good film forming and excellent antistatic ability

Active Publication Date: 2019-07-16
SHIN ETSU CHEM IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, it is difficult to change the H 2 The presence ratio of non-doped acidic substituents that have a great influence on physical properties such as solubility, dispersibility, and re-agglomeration of O, re-agglomeration occurs during storage, and the liquid quality becomes uneven. It is suitable for resists. In the case of electrostatic film, there is a problem that it is easy to cause defects in the peeling process, etc.

Method used

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  • Conductive polymer composition, coated article, and patterning process
  • Conductive polymer composition, coated article, and patterning process
  • Conductive polymer composition, coated article, and patterning process

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0169] [Method for producing conductive polymer composition]

[0170] A composite (conductive polymer composite) of component (A) and component (B) can be obtained, for example, by adding a raw material as component (A) to an aqueous solution of component (B) or a water-organic solvent mixed solution Two or more aniline monomers, adding an oxidizing agent and, depending on the situation, an oxidation catalyst, are oxidatively polymerized.

[0171] As the oxidant and oxidation catalyst, peroxodisulfate (persulfate) such as ammonium peroxodisulfate (ammonium persulfate), sodium peroxodisulfate (sodium persulfate), potassium peroxodisulfate (potassium persulfate), etc. ), ferric chloride, ferric sulfate, copper chloride and other transition metal compounds, metal oxides such as silver oxide and cesium oxide, peroxides such as hydrogen peroxide and ozone, organic peroxides such as benzoyl peroxide, oxygen, etc. .

[0172] Water or a mixed solvent of water and a solvent can be us...

Embodiment

[0200] Hereinafter, the present invention will be specifically described using synthesis examples, examples, and comparative examples, but the present invention is not limited thereto.

[0201] Hereinafter, monomers providing repeating units constituting the polyaniline-based conductive compound (A) and monomers providing repeating units constituting the dopant polymer component (B) used in Synthesis Examples, Examples, and Comparative Examples will be described. The structure is shown in Table 1 and the names are as follows.

[0202] [Table 1]

[0203]

[0204] A-1: Aniline

[0205] A-2: 2-Methoxyaniline

[0206] A-3: 2-Ethoxyaniline

[0207] B-1: Styrene-4-sulfonic acid

[0208] B-2: 1,1,3,3,3-pentafluoro-2-(4-vinylbenzoyloxy)-propane-1-sulfonate

[0209] B-3: 1,1,3,3,3-Pentafluoro-2-(3-methacryloyloxy-adamantane-1-carbonyloxy)-propane-1-sulfonate

[0210] B-4: 1,1,3,3,3-pentafluoro-2-(3-methacryloyloxy)-propane-1-sulfonate

[0211] B-5: 2-Methyl-acrylic acid-3-hyd...

Synthetic example 1

[0303] At 25°C, 213.8 mmol of (A-1) and 11.3 mmol of (A-2) were mixed in a solution in which 225.0 mmol of dopant polymer 1 was dissolved in 1,000 mL of ultrapure water The solution.

[0304] 202.5 mmol of ammonium persulfate dissolved in 200 mL of ultrapure water was slowly added with stirring while keeping the mixed solution obtained as described above at 0° C., and stirred for reaction.

[0305] The resulting reaction liquid was added dropwise to 4,000 mL of acetone after concentration to obtain a green powder. This green powder was again dispersed in 1,000 mL of ultrapure water, and was added dropwise to 4,000 mL of acetone to purify and recrystallize the green powder. This operation was repeated three times, and the obtained green powder was dispersed again in 2,000 mL of ultrapure water, and about 1,000 mL of water was removed by ultrafiltration. This operation was repeated 10 times to obtain a polyaniline conductive polymer composite 1 . The ultrafiltration condition...

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Abstract

The present invention is a conductive polymer composition, which has good filterability and film-formability of a flat film onto an electron beam resist, and is suitably usable for a antistatic film for electron beam resist drawing having lower surface resistivity (Omega / wei) to show excellent antistatic performance in an electron beam drawing process, and excellent peelability with HO or an alkaline developer after drawing. The conductive polymer composition includes (A) a polyaniline-based conductive polymer having two or more kinds of repeating units shown by the following general formula (1); and (B) a dopant polymer which contains a repeating unit shown by the following general formula (2) and has a weight-average molecular weight in a range of 1,000 to 500,000.

Description

technical field [0001] The present invention relates to a conductive polymer composition containing a polyaniline-based conductive polymer, a covering using the composition, and a pattern forming method. Background technique [0002] Conventionally, microfabrication by lithography using a photoresist has been performed in the manufacturing process of semiconductor devices such as ICs and LSIs. This is a method of inducing a crosslinking or decomposition reaction of a thin film by light irradiation, significantly changing the solubility of the thin film, and etching a substrate using a resist pattern obtained by developing with a solvent or the like as a mask. In recent years, with the high integration of semiconductor elements, high-precision microfabrication using short-wavelength light is required. Electron beam-based lithography is being developed as a next-generation technology because of its short-wavelength characteristics. [0003] As a problem unique to electron be...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09D179/02C09D5/24C09D7/65G03F1/20
CPCC09D179/02C09D5/24C09D7/65G03F1/20C08L2201/04C08L25/18C08L33/16C09D125/18C09D133/14C08G73/0266G03F7/093H01B1/128C08F212/30C08F212/20C08L33/14C08K5/175C08F220/282C08F212/14C08F220/281C08F220/24C08F220/382C08F12/30C08F12/20C08G61/04C08G2261/1426C08G2261/1452C08G2261/146C08G2261/148G03F7/164
Inventor 长泽贤幸
Owner SHIN ETSU CHEM IND CO LTD
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