Test system for improving photoluminescence test effect of semiconductor material

Abstract

The invention relates to a test system for improving photoluminescence test effect of semiconductor material, which comprises a laser device, a spectral measurement system and light path components, wherein the light path components comprise a reflecting mirror, a lens and a paraboloidal mirror and constitute a test light path. A laser excited from the laser device turns a direction by the reflecting mirror and then directly irradiates the tested sample after being focused by the lens; and the laser reflected by the tested sample is collected by the paraboloidal mirror to turn the direction and be collimated, and then sent to the spectral measurement system in the form of broad beam. The laser device in the invention selects appropriate emission wavelength according to the characteristics of the semiconductor material, thereby obtaining high photoluminescence strength, enhancing the photoluminescence test capacity and improving the test sensitivity. In addition, the invention does not have limits and special requirements for the spectral measurement system, and thus, the realization mode is very flexible.

Description

technical field [0001] The invention relates to the technical fields of semiconductor materials, semiconductor testing and spectroscopy, in particular to a testing system for improving the photoluminescence testing effect of semiconductor materials. Background technique [0002] Since the invention of semiconductor lasers in the 1960s, various semiconductor optoelectronic materials have developed rapidly, and their structures have developed from simple bulk materials to complex microstructure materials such as heterojunctions, quantum wells, and superlattices. The scope has expanded from the narrow band in the near-infrared in the early stage to the entire ultraviolet, visible, near-infrared, mid-infrared and even far-infrared bands. The material system also includes VI, III-V, II-VI, IV-VI and organic compounds, etc. And feet. Semiconductor lasers have included distributed feedback, surface emission, and quantum cascade, etc., and their basic structure has also been extend...

AI Technical Summary

Problems solved by technology

For example: the traditional photoluminescence measurement still continues to use the early excitation light sources for near-infrared short-wave end materials, such as He-Ne and Ar in the visible light band. + , YAG, and He-Cd in the ultraviolet band and other types of gas or solid-state lasers. Although these lasers are developed earlier and more mature, they all have problems such as large size, low efficiency, high price, and inconvenient use. With the continuous extension of the luminescent wavelength of the material to the long-wave direction and the emergence of various complex structural materials, the excitation efficiency of these lasers will be greatly limited, thus reducing the test sensitivity of the photoluminescence method, thereby limiting the test and characterization capabilities of this effective method

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