This invention relates to the field of advanced
semiconductor packaging and chiplet integration technology, specifically disclosing a heterogeneous die
system-on-a-
chip and its fabrication method. The method includes: S1: providing an adapter board, the top surface of which is provided with a first I / O pad, and forming a first
metal interconnect region above the first I / O pad, or using the first I / O pad as the first
metal interconnect region; S2: providing a chiplet, the top surface of which is provided with a second I / O pad, and fabricating a second
metal interconnect region on the top surface of the chiplet. This invention achieves self-aligned
interconnection of the
metal interconnect regions between the chiplet and the adapter board by combining an open area on the top surface of the adapter board with
selective deposition, eliminating the need for high-precision
photolithography alignment and significantly reducing
process complexity. Simultaneously, this method supports multi-layer PAD expansion, multi-array parallel
interconnection,
wafer-level batch integration, and various
layout methods, achieving high-density, low-latency, and high-reliability chiplet
interconnection.