Method for manufacturing lengthwise region of CoolMOS
A manufacturing method and vertical technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as complex process, high processing cost, and long process time, so as to overcome voids, improve process efficiency, and improve process overly complex effects
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[0036] Taking a PMOS-based CoolMOS device as an example, the manufacturing method of the CoolMOS of the present invention includes the following steps:
[0037] In the first step, an epitaxial process is used to grow a lightly doped N-type epitaxial layer 11 on the heavily doped N-type silicon substrate 10. The epitaxial process is to deposit a single crystal layer on a single crystal substrate, usually using chemical vapor deposition (CVD) equipment.
[0038] In the second step, using a photolithography process, an ion implantation window 110 is defined on the epitaxial layer 11, and the position of the ion implantation window 110 is the position of the P-type longitudinal region of the CoolMOS device. Defining the ion implantation window 110 means that after the photoresist 20 is coated on the silicon wafer, the photoresist 20 above the ion implantation window 110 is removed through steps such as exposure and development, and the photoresist 20 in the remaining area is retained. ...
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