Developing equipment of organic electroluminescent display panel and method thereof

Abstract

The invention relates to developing equipment of an organic electroluminescent display panel and a method thereof. The main developing method is an impregnating developing method, and meanwhile, a certain spraying pressure is applied onto a developing liquid level mainly in a spraying manner, thereby reducing foam generated by direct impact against a substrate, improving the developing effect; in addition, the length of the equipment and the space of a purification room occupied by the euipment can be reduced in a circulating manner; therefore, the invention is beneficial to the saving of the research and development cost, has the advantages of simple equipment structure and low manufacturing cost, is easy for maintenance, and greatly reduces the length of the equipment.

Description

technical field [0001] The invention relates to the technical field of manufacturing electronic semiconductor components, in particular to an organic electroluminescent display panel developing device and a method thereof. Background technique [0002] Organic electroluminescent display device (OLED), as a major branch of flat panel display, has the characteristics of thin panel thickness (less than 2mm), self-illumination, low operating voltage (3-10V), high brightness, high contrast, wide viewing angle and other characteristics. A flat display technology with great potential. Organic electroluminescent display devices have been commercially mass-produced in some manufacturers, but since organic electroluminescent display devices (OLED) are a relatively new display field after all, there are still many difficulties to be overcome. The experimental line equipment for research and development of organic electroluminescent devices is still a necessary equipment for mass produ...

AI Technical Summary

Problems solved by technology

A simple use of different developing tanks and water washing tanks to develop the photoresist layer, during which the substrate must be taken out or transported by hand, and dried, which greatly prolongs the developing process, and cannot accurately control the developing time. In addition, due to human factors, it is impossible to Strict control, easy to damage and stain during the transfer process, can not guarantee the quality of the developed substrate

Another situation is the more common method used in mass production equipment: transfer the exposed glass into the developing chamber, use a swinging nozzle to spray the developer directly on the surface of the photoresist, and after a period of time, the pattern will appear. In this case, the capital investment will be very large, the equipment has strict requirements on the nozzles, and the spraying height and distance pressure must be specially arranged to make the spraying uniform and the water flow stable to achieve the best effect. The whole equipment is too complicated and not easy to spray. Repair does not meet the requirements of the experimental line, which is simple and efficient, less investment, easy to repair, and as short as possible

Moreover, because the sprayed developer directly hits the substrate, a large amount of foam will be generated, which will affect the uniformity of the development reaction, making it difficult to obtain high-resolution OLED display devices.

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