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Method for preparing fluorine-doped tin oxide (FTO) transparent conducting film on low-temperature substrate

A transparent conductive film and substrate technology, applied in chemical instruments and methods, metal material coating technology, lamination equipment, etc., can solve the problems of inability to prepare FTO films, etc., and achieve the effect of overcoming contradictions and loose production requirements

Active Publication Date: 2012-10-31
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to overcome the defect that the prior art cannot prepare FTO thin films on substrates that are not resistant to high temperatures, thereby providing a method for preparing FTO thin films on substrates that are not resistant to high temperatures

Method used

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  • Method for preparing fluorine-doped tin oxide (FTO) transparent conducting film on low-temperature substrate
  • Method for preparing fluorine-doped tin oxide (FTO) transparent conducting film on low-temperature substrate

Examples

Experimental program
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Effect test

Embodiment 1

[0040] Take a smooth and flat aluminum sheet with a thickness of about 200 microns, place it on a heating table in an ultrasonic spray pyrolysis device, and heat it to 380°C. Then mix the prepared 0.075M with 19.15% mass ratio of NH 4 F-SnCl 4 The ethanol solution was poured into an ultrasonic fogger, and the spraying time was controlled to be 10 minutes to obtain an FTO film with a thickness of 150 nm on the aluminum sheet. Cool down to room temperature, evenly coat a layer of 502 glue on the FTO film on the surface of the aluminum sheet, and evenly cover a layer of PET flexible transparent substrate on the 502 glue. After the 502 glue is completely cured, put it into 0.5M hydrochloric acid solution. After the aluminum sheet is completely dissolved in dilute hydrochloric acid, take out the PET, rinse the residual hydrochloric acid solution on the surface with deionized water and dry it. Thus, the FTO film was completely transferred to the PET substrate, and the FTO film and...

Embodiment 2

[0042] Take an aluminum sheet with a thickness of about 300 microns as an anode, put it into 0.3M oxalic acid solution and apply a voltage of 40V to perform electrochemical corrosion treatment on the surface of the aluminum sheet for 3 minutes, and obtain an aluminum sheet with a certain degree of roughness on the surface. The obtained rough aluminum flakes were placed on a heating table in an ultrasonic spray pyrolysis device and heated to 400 °C. Then mix the prepared 0.075M with 19.15% mass ratio of NH 4 F-SnCl 4 The ethanol solution was poured into an ultrasonic fogger, and the spraying time was controlled to be 10 minutes to obtain an FTO film with a thickness of 150 nm on the aluminum sheet. This layer of FTO film will be evenly covered on the surface of the rough aluminum sheet. Since the roughness of the aluminum sheet will bring about the unevenness of the surface, the FTO film will also have certain unevenness. Cool down to room temperature, evenly coat a layer of ...

Embodiment 3

[0044] Aluminum with a purity of 99.99% is sputtered onto a glass plate by magnetron sputtering to form an aluminum film with a thickness of about 150 nanometers attached to the glass plate. Place the glass plate with the aluminum film on the heating table in the ultrasonic spray pyrolysis device and heat it to 450 °C. Then mix the prepared 0.075M with 19.15% mass ratio of NH 4 F-SnCl 4 The ethanol solution was poured into an ultrasonic fogger, and the spraying time was 7 minutes to obtain a smooth FTO film with a thickness of 100 nm on the aluminum film. Down to room temperature, the surface of the FTO film on the aluminum film is covered with a layer of 30 micron thick transparent hot-melt adhesive, and then the hot-melt adhesive is flatly covered with a layer of PMMA substrate, which is placed on the hot press ( The temperature of the pressing plate is set to 80-100°C) and press for 1 minute, and remove it after the hot melt adhesive is completely melted and solidified. ...

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Abstract

The invention provides a method for preparing a fluorine-doped tin oxide (FTO) transparent conducting film on a low-temperature substrate. The method comprises the following steps of: preparing an FTO film on a high temperature resistant substrate at a high temperature; adhering the FTO film to the low-temperature substrate by using a transparent adhesive to obtain a film sheet comprising the high temperature resistant substrate, the FTO film, the transparent adhesive and the low-temperature substrate; putting the obtained film sheet into chemical treatment liquid; and after the high temperature resistant substrate is completely dissolved into the chemical treatment liquid, taking the FTO transparent conducting film consisting of the FTO film, the transparent adhesive and the low-temperature substrate out, wherein the chemical treatment liquid can remove the high temperature resistant substrate and cannot react with the FTO film, the transparent adhesive and the low-temperature substrate. The method completely solves the problem that the FTO transparent conducting film cannot be prepared on the low-temperature substrate.

Description

technical field [0001] The invention relates to a method for preparing an FTO transparent conductive film, in particular to a method for preparing an FTO transparent conductive film on a low-temperature substrate. Background technique [0002] Transparent Conducting Oxide (TCO) thin films are widely used in various fields today and in the future because of their high optical transmittance and low resistance, such as solar cells, flat panel displays, sensors And various optoelectronic or electro-optic devices. The thickness of TCO films is generally on the order of tens of nanometers to microns, so such films often need to be attached to transparent substrates, and glass is the most widely used transparent substrate. A glass substrate prepared with a transparent conductive oxide film is called transparent conductive glass. Transparent conductive glass is widely used, such as: insulating glass coated with Low-E (Low-E) film, shielding glass for isolating electromagnetic radi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C26/00B32B7/12B32B37/26
Inventor 黄小铭孟庆波罗艳红李冬梅
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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