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Air floating motion platform

ActiveCN116928221Blow gas consumptionAnti-tipping propertiesBearingsLinear motionControl theory
An air-floating motion platform includes: a base, a linear motion drive device, an air-floating device, and an air supply device. The air-floating device is movably supported on the base, and the air supply device is disposed on the base, passing through the air-floating device. The linear motion drive device drives the air-floating device to reciprocate linearly on the support surface of the base. The air supply device is in an open state facing the location of the air-floating device, supplying air to the air-floating device, forming an air film between the air-floating device and the support surface of the base, causing the air-floating device to suspend on the support surface of the base. The air supply device gradually closes as it deviates from and eventually leaves the air-floating device. Magnetic preloading increases the stiffness of the air film, and the mechanical switching function formed by the cooperation of the air-floating device and the air supply device achieves air supply without air pipe disturbance during movement, reducing air consumption compared to stationary guide rail air-floating. The air-floating motion platform provided by this invention effectively solves the problems of high air consumption, low air film stiffness, and air pipe disturbance in existing air-floating motion platforms.
Owner:SHANGHAI LIGHT-WONDER OPTICS CO LTD

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