Semiconductor chip assembly with a post/base heat spreader and a signal post
A technology of semiconductors and chipsets, applied in the fields of semiconductor devices, semiconductor/solid-state device manufacturing, and semiconductor/solid-state device components, etc., which can solve the problems of reduced heat dissipation, limited routing capability, and excessive volume.
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[0081] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0082] Figure 1 to Figure 4 It is a cross-sectional view showing a method for manufacturing a heat conduction stud 22 , a signal stud 24 and a base 26 in an embodiment of the present invention, Figure 5 and Figure 6 respectively Figure 4 top and bottom views.
[0083] figure 1 Is a cross-sectional view of a metal plate 10 comprising opposing major surfaces 12 and 14 . The illustrated metal plate 10 is a copper plate having a thickness of 330 microns. Copper has the advantages of high thermal conductivity, good bonding and low cost. The metal plate 10 can be made of various metals such as copper, aluminum, iron-nickel alloy, iron, nickel, silver, gold, mixtures thereof and alloys thereof.
[0084] figure 2 It is a cross-sectional view showing a patterned etch stop layer 16 and a fully covered etch stop layer 18 formed on the metal plate 10...
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