Method for removing boron and phosphorus impurities in industrial silicon by ferrous compounds
An industrial silicon and compound technology, which is applied in silicon compounds, chemical instruments and methods, inorganic chemistry, etc., can solve the problems of high equipment requirements, high cost, and high power consumption of the process, and achieve low energy consumption, low cost, and easy operation Effect
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specific Embodiment 1
[0037] 1. Coat a dense SiC coating on the surface of the graphite crucible as the inner layer, and then coat the SiC coating with Y 2 o 3 The coating is used as the outer layer to increase the service life of the graphite crucible.
[0038] 2. Weigh Fe 2 o 3 (20%wt)-SiO 2 (60%wt)-CaF 2 (20%wt) total 130kg of slagging agent, put into the graphite of coating. Close the furnace cover and turn on the power to 120KW to melt the slag.
[0039] 3. After the slag material is melted, add 25Kg industrial silicon (B content is 8.6ppmw, P content is 15ppmw). After the slag and silicon materials are completely melted, reduce the power to 90KW, and the reaction temperature at this time is 1550°C as measured by an infrared thermometer.
[0040] 4. Introduce the mixed gas Ar+H into the system 2 O, where the volume fraction of Ar is 60%, H 2 The volume fraction of O is 40%. The ventilation rate is 2L / min, and the melt is fully stirred.
[0041] After 5.30 minutes, the ventilation wa...
specific Embodiment 2
[0043] Technological process is with embodiment 1. Add slagging agent Fe 3 o 4 (40%wt)-SiO 2 (45%wt)-CaF 2 (15%wt) 100kg in total. The slag is melted at a power of 150KW, and then 45kg of industrial silicon is added. After complete melting, reduce the power to 120KW, and the reaction temperature is 1850°C. Pass 90%Ar+10%H 2 O stir the melt, the ventilation rate is 1L / min. After the slagging continued for 15 minutes, 45Kg of industrial silicon was added again, for a total of 15 times. A total of 573Kg of refined polysilicon was obtained. The average B content measured by ICP-MS is 0.25ppmw, and the average P content is 1.5ppmw.
specific Embodiment 3
[0044] Technological process is with embodiment 1. Add slagging agent Fe(OH) 3 (35%wt)-SiO 2 (40%wt)-CaF 2 (25%wt) 100kg in total. The slag is melted at a power of 130KW, and then 35kg of industrial silicon is added. After complete melting, reduce the power to 110KW, and the reaction temperature is 1750°C. Pass 70%Ar+30%H 2 O Stir the melt, the ventilation rate is 1.5L / min. After the slagging continued for 20 minutes, 25Kg of industrial silicon was added again for a total of 10 times. A total of 212Kg of refined polysilicon was obtained. The average B content measured by ICP-MS is 0.12ppmw, and the average P content is 0.7ppmw.
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