Double frequency laser interferometer for absolute distance measurement and measurement method thereof

A dual-frequency laser interference, absolute distance technology, applied in measurement devices, optical devices, radio wave measurement systems, etc., can solve the problem of not considering the influence of light intensity control items, unable to meet high-precision measurement and other problems
CN102168944AActive Publication Date: 2011-08-31BEIJING GUOWANG OPTICAL TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
BEIJING GUOWANG OPTICAL TECH CO LTD
Publication Date
2011-08-31

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Abstract

The invention relates to a double frequency laser interferometer for absolute distance measurement and a measurement method thereof. The double frequency laser interferometer comprises a light source, an optical fiber coupler, an isolator, a collimator, a photoelectric detector, a piezoelectric ceramic, a data acquisition card and a computer, wherein the light source adopts two semiconductor lasers in different wavelengths having light source controllers; the photoelectric detector is used for converting a received interference signal into an electric signal and inputting to the data acquisition card; and the computer is used for performing data treatment, thereby acquiring a to-be-measured distance. The linear frequency modulation technique is combined with the sine phase modulation interference measurement technique in the interferometer provided by the invention, thereby widening the measurement scope. The phase of an interference signal is calculated by solving a linear equation by utilizing the related parameters, thereby eliminating the system error caused by light intensity modulation of the light source in principle and increasing the measurement precision.
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Description

technical field

[0001] The invention relates to an absolute distance measurement interferometer, in particular to a dual-frequency laser interferometer for absolute distance measurement and a measurement method thereof. Background technique

[0002] Distance measurement plays an important role in industrial production and scientific research. Interferometry technology is widely used in absolute distance measurement because of its advantages of high precision, high resolution and non-contact. The sinusoidal phase modulation interferometry technology is an international cutting-edge interferometry technology, which has the advantages of high precision, convenient modulation, and simple structure. It has been valued by researchers for a long time, and has been greatly developed in the field of absolute distance measurement.

[0003] Sinusoidal phase-modulated interferometers for absolute distance measurement are nanometer-accurate but measure only half a wavelength. In order ...

Claims

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