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Lens center error measurement system based on interference principle

A lens center and error measurement technology, which is applied in the field of optical measurement, can solve the problems of reducing the contrast of interference fringes, the measurement is not intuitive enough, and the measurement efficiency is not high, so as to reduce the loss of light energy, the relative position accuracy is not high, and the measurement range is expanded. Effect

Inactive Publication Date: 2011-09-07
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The instrument has the following disadvantages: in one clamping process, only the center error of a single surface of the lens can be measured, and the measurement efficiency is not high; in the process of measuring the center error of a single surface to be measured, two mirrors need to be adjusted twice to Make the measurement beam perpendicular to the surface to be measured, and the operation is cumbersome; in the measurement process, it is also necessary to know the distance between the two measurement beams and the intersection point of the lens surface, and the measurement of the distance value is not intuitive and the accuracy is not high; the instrument mainly Use a large diameter (φ200mm~φ500mm) lens to measure the center error; at the same time, in this system, the contrast of the interference fringes will be reduced because the measuring beam has to undergo multiple refractions

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  • Lens center error measurement system based on interference principle
  • Lens center error measurement system based on interference principle
  • Lens center error measurement system based on interference principle

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Embodiment Construction

[0034] like figure 2 As shown, the measurement system of the present invention includes a laser 1, a collimating mirror 2, a polarizer 3, a beam splitting prism 4, a beam splitting mirror 5, a first λ / 4 wave plate 6, a reference mirror 7, an upper adjustable mirror 8, Lower adjustable mirror 9, lower fixed mirror 10, upper fixed mirror 11, second λ / 4 wave plate 12, analyzer 13, imaging lens 14, CCD camera 15, computer 16 and precision rotary table 17.

[0035]After the laser beam emitted by the laser 1 is expanded by the collimator 2, the polarizer 3 generates a plane polarized light at 45° to the horizontal plane and puts it on the beam-splitting prism 4. The beam-splitting prism 4 divides the incident laser light into two beams of parallel light; The beam of parallel light is divided into a reference beam and a measurement beam by the beam splitter 5, and the reference beam is incident on the reference mirror 7 through the first λ / 4 wave plate 6, and is reflected by the ref...

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Abstract

The invention relates to a lens center error measurement system based on an interference principle. The lens center error measurement system comprises a laser, a collimating lens, a polarizer, a dispersion prism, a spectroscope, a first lambda / 4-wave plate, a reference reflector, an upper-adjustable reflector, a bottom-adjustable reflector, a bottom-fixed reflector, an upper-fixed reflector, a second lambda / 4-wave plate, a polarization analyzer, an imaging lens, a charge coupled device (CCD) camera, a computer and a precision rotary table. The system can be used for detecting the center errors of the front surface and the rear surface of a spherical lens or an axisymmetric aspheric lens simultaneously, is high in measuring efficiency and simple in operation and does not reduce the contrast of interference fringes.

Description

technical field [0001] The invention relates to a lens center error measurement system based on the principle of interference, which is used for measuring the center error of the front and rear surfaces of spherical and axisymmetric aspheric lenses, and belongs to the technical field of optical measurement. technical background [0002] The centering quality of each discrete component of the optical system is directly related to the final imaging quality of the entire system, and it is one of the main problems to be solved in a high-quality optical imaging system. [0003] The current measurement method of optical center error is still based on optical measurement. There are mainly two types of measurement methods: collimation measurement and interference comparison measurement. The interference comparison measurement method is based on the principle of interference. It uses the measurement beam reflected by the surface of the measured lens to interfere with the reference b...

Claims

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Application Information

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IPC IPC(8): G01M11/02G01B11/24
Inventor 汪宝旭蒋世磊
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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