Lens center error measurement system based on interference principle
A lens center and error measurement technology, which is applied in the field of optical measurement, can solve the problems of reducing the contrast of interference fringes, the measurement is not intuitive enough, and the measurement efficiency is not high, so as to reduce the loss of light energy, the relative position accuracy is not high, and the measurement range is expanded. Effect
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[0034] like figure 2 As shown, the measurement system of the present invention includes a laser 1, a collimating mirror 2, a polarizer 3, a beam splitting prism 4, a beam splitting mirror 5, a first λ / 4 wave plate 6, a reference mirror 7, an upper adjustable mirror 8, Lower adjustable mirror 9, lower fixed mirror 10, upper fixed mirror 11, second λ / 4 wave plate 12, analyzer 13, imaging lens 14, CCD camera 15, computer 16 and precision rotary table 17.
[0035]After the laser beam emitted by the laser 1 is expanded by the collimator 2, the polarizer 3 generates a plane polarized light at 45° to the horizontal plane and puts it on the beam-splitting prism 4. The beam-splitting prism 4 divides the incident laser light into two beams of parallel light; The beam of parallel light is divided into a reference beam and a measurement beam by the beam splitter 5, and the reference beam is incident on the reference mirror 7 through the first λ / 4 wave plate 6, and is reflected by the ref...
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