Clamping apparatus for flushing photomask
A card mounting device and photomask technology, which is applied in the photomechanical process of photomechanical processing of originals, optics, and pattern surfaces, etc., can solve the problems of inability to use cleaning technology, large volume, affecting cleaning efficiency, etc. To achieve the effect of reducing installation and debugging time, reasonable and compact structure
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[0018] see Figure 1~6 As shown, the clamping device for photomask flushing of the present invention includes a workbench 1 and an opening and closing drive mechanism and an automatic turning mechanism installed on the workbench 1. The workbench 1 of the present invention is provided with an aperture 1-1 , The workbench 1 is set on the top of the cleaning bin. On the top of the cleaning bin, the photomask 20 is grasped, turned and placed by the card loading device of the present invention, and the cleaning liquid sprayed from the nozzles is applied to both sides of the photomask 20 Perform cleaning.
[0019] see Figure 1~4 As shown, the opening and closing drive mechanism of the present invention includes two guide rail seats 5 diagonally arranged along the worktable 1, a drive assembly and a synchronization assembly respectively installed on the two guide rail seats 5. The drive assembly includes an air cylinder 10, a linear guide 11 and a transition The sliding block 6 and the...
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