Multi-channel filter array micro electro mechanical system (MEMS) spectrum type gas sensitive sensor
A gas sensor and filter array technology, applied in the field of gas sensors, can solve the problems of complex processing, poor selectivity, and low sensitivity, and achieve the effects of flexible parameter adjustment, overcoming poor selectivity, and high sensitivity
Active Publication Date: 2011-11-09
北京中科微知识产权服务有限公司
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[0005] In order to solve the problems of low sensitivity, poor selectivity, complex processing and high cost of existing gas sensors, the present invention provides a multi-channel filter array MEMS gas sensor to meet people's requirements for convenient, fast and accurate detection of gas environments
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[0027] In order to make the purpose, technical solutions and advantages of the present invention more clear, the following will be combined with the analysis of chloroform vapor in the ambient gas as a specific example, and with reference to the accompanying drawings, the present invention will be further described in detail.
[0028] Such as figure 1 as shown, figure 1 The multi-channel filter array MEMS spectral type gas sensor plane structure schematic diagram provided for the present invention, this sensor is made on the silicon substrate light source 1, gas chamber 2, one-dimensional photonic crystal filter array 3, infrared light intensity detection array 4 Composition, wherein, the infrared light emitted by the light source 1 enters the gas chamber 2, and after interacting with the gas to be measured, it is emitted through different filter channels of the one-dimensional photonic crystal filter array 3; the light intensity signals emitted by each filter channel are dete...
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The invention discloses a multi-channel filter array micro electro mechanical system (MEMS) spectrum type gas sensitive sensor. Category and concentration of a measured gas are determined by analyzing the infrared transmission spectrum of the gas to be measured. The sensor consists of a light source (1) manufactured on a silicon substrate, a gas chamber (2), a one-dimensional photonic crystal filter array (3) and an infrared light intensity detection array (4), wherein infrared light emitted by the light source (1) enters the gas chamber (2); after the infrared light is interacted with the gas to be measured, the infrared light is emitted through different filter channels of the one-dimensional photonic crystal filter array (3); light intensity signals emitted from the filter channels areconverted into electrical signals on the corresponding different detection units of the infrared light intensity detection array (4) respectively and output, and the intensity of the signals output by the detection units at different positions reflects the absorption condition of the gas to be measured on the infrared light of different wavelengths; and the components of the gas can be judged andthe concentration of the gas can be determined by measuring the transmission spectrum of the gas to be measured and comparing the transmission spectrum with the characteristics of a pre-stored map and by means of a chemometrics algorithm.
Description
technical field [0001] The invention relates to the technical field of gas sensors, in particular to a multi-channel filter array MEMS spectral gas sensor. The sensor determines the type and concentration of the gas to be measured by detecting the infrared transmission spectrum of the gas to be measured, combined with a chemometric method . The invention effectively solves the problems of low selectivity and poor anti-interference of the existing gas sensor, and its manufacture is compatible with the standard CMOS process, which facilitates on-chip integration. Background technique [0002] With the continuous progress of society, the application of gas sensor in pharmaceutical, medical testing, food industry, petrochemical, customs, coal mine and other fields is becoming more and more important. Traditional gas sensors are large in size, high in power consumption, low in sensitivity and inconvenient to use, and are difficult to popularize; sensitive film MEMS gas sensors a...
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Login to View More IPC IPC(8): G01N21/35G01N21/3504
Inventor 高超群景玉鹏
Owner 北京中科微知识产权服务有限公司