Thermo-electric pile infrared detector

Abstract

A thermopile infrared detector, including a fully hollow structure substrate and a thermopile on it, a first infrared absorption layer and a passivation layer, a reflective layer formed on the passivation layer, and a sacrificial layer release technology The second infrared absorbing layer is formed. The detector increases the infrared absorption rate and increases the temperature difference between the cold end and the hot end of the thermocouple, thereby increasing the response rate of the detector and improving the sensitivity.

Description

technical field [0001] The present invention generally relates to the field of infrared detectors, in particular to a thermopile infrared detector based on a micro-electromechanical system. Background technique [0002] At present, the use of infrared technology for infrared temperature measurement, infrared alarm, infrared detection, infrared tracking, etc., is widely used in various fields such as military, industry, medicine, agriculture and forestry, environmental protection, fire protection, search and rescue, etc. Among them, the thermopile infrared detector has many advantages and is widely used. The thermopile infrared detector is an uncooled infrared detector based on the Seebeck effect. With the development of Electro Mechanical systems), thermopile infrared detectors based on micromachines are also widely used. At present, for micromechanical thermopile types, the main types of thermocouples are: P-type polysilicon and gold thermocouples, Si epitaxial layer P-type...

AI Technical Summary

Problems solved by technology

Among them, the thermopile infrared detector has many advantages and is widely used. The thermopile infrared detector is an uncooled infrared detector based on the Seebeck effect. With the development of Electro Mechanical systems), thermopile infrared detectors based on micromachines are also widely used. At present, for micromechanical thermopile types, the main types of thermocouples are: P-type polysilicon and gold thermocouples, Si epitaxial layer P-type Diffusion area and aluminum thermocouple, N-type polysilicon and P-type polysilicon thermocouple, and use silicon oxide-silicon nitride composite dielectric layer as the infrared absorption layer. Compared with other detectors, this micromechanical thermopile infrared detector has high Sensitivity, relaxed working environment and very wide spectral response, and compatible with standard IC technology, low cost and suitable for mass production, but with the reduction of pixel size, the infrared absorption area also decreases, resulting in absorption efficiency decrease, and the response rate also decreases

Images