Laminate, method for producing same, electronic device member, and electronic device
A manufacturing method and technology of electronic equipment, applied in the fields of electronic equipment, components for electronic equipment, and electronic equipment, capable of solving problems such as damage to vapor deposition films, easy deterioration of electrodes and light conversion layers, and insufficient moisture resistance (gas barrier properties) of sheets. , to achieve high-efficiency manufacturing, excellent impact absorption, and excellent gas barrier properties
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Embodiment 1
[0250] On a polyethylene terephthalate film ("PET38T-300", manufactured by Mitsubishi Plastics Co., Ltd., thickness 38 μm) (hereinafter referred to as "PET film") as a base film, a polyorganosiloxane Silicone resin ("KS835", manufactured by Shin-Etsu Chemical Co., Ltd.) containing polydimethylsiloxane as the main component of an alkane compound was heated at 120°C for 2 minutes to form a 100nm polydimethylsiloxane-containing silicone resin on the PET film. layer of alkanes. Next, use the image 3 The plasma ion implantation apparatus shown performs plasma ion implantation of argon on the surface of the layer containing polydimethylsiloxane. It should be noted that the presence of argon in the vicinity of 10 nm from the surface of the layer containing polydimethylsiloxane was confirmed by measurement using XPS.
[0251] The conditions of plasma ion implantation are as follows.
[0252] ? Plasma generating gas: argon
[0253] ? Duty cycle: 0.5%
[0254] ? Repeat frequency: ...
Embodiment 2
[0271] In Example 1, the laminated body 2 was produced in the same manner as in Example 1, except that the plasma generating gas for plasma ion implantation was changed from argon to nitrogen.
Embodiment 3
[0273]The laminated body 3 was fabricated in the same manner as in Example 1 except that the plasma generating gas for plasma ion implantation was changed from argon to helium in Example 1.
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Abstract
Description
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