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Dynamic gas distributing system for standard gas

A technology of standard gas and diluent gas, which can be used in gas and gas/vapor mixing, mixer accessories, dissolution, etc., and can solve problems such as large consumption of diluent gas.

Inactive Publication Date: 2014-07-23
NAT INST OF METROLOGY CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when configuring a smaller concentration of standard gas (for example, about 10 -9 ~10 -6 mol / mol concentration), need to consume a large amount of diluent gas such as pure nitrogen

Method used

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  • Dynamic gas distributing system for standard gas
  • Dynamic gas distributing system for standard gas
  • Dynamic gas distributing system for standard gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Example 1: Using figure 1 A dynamic gas distribution device to configure about 400ppb hydrogen sulfide standard gas in high-purity nitrogen

[0032] Using high-purity nitrogen as the carrier gas and dilution gas source 1, the high-purity nitrogen passes through the pressure regulator valve 2 to control the pressure; the mass flow controller 3 controls the flow of the carrier gas passing through the diffusion cell 5; the mass flow controller 4 controls the flow of the dilution gas; The hydrogen sulfide permeation tube 6 is placed in the diffusion cell 5 at 45°C, and its permeation rate is 0.763 μg / min; the flow controller 7 controls the forced vent flow; therefore, the hydrogen sulfide concentration at outlets 10 and 11 can be obtained by the following calculation:

[0033] The mass rate of hydrogen sulfide entering the mixing chamber 9 is calculated by the following formula:

[0034] q = β M · ...

Embodiment 2

[0049] Example 2: Using figure 1 A dynamic gas distribution device to configure about 50ppb hydrogen sulfide standard gas in high-purity nitrogen

[0050] Operation and parameter are the same as embodiment 1, just change following parameter: vent flow is F 7 = 90ml / min. Results: The theoretical concentration of hydrogen sulfide standard gas at outlets 10 and 11 is 53.5ppb; the concentration of gas at outlet 11 is analyzed by a total sulfur analyzer, and the concentration is 51.3ppb, and the relative deviation between the two is 4.1%.

[0051] As mentioned above, when only by adjusting the dilution gas flow F 4To obtain a lower concentration of standard gas, it is often necessary to adjust the dilution gas flow to a large extent, even exceeding the capacity of the system pipeline. In contrast, the present invention can simply and quickly obtain standard gases with a wide range of concentrations by adjusting the flow controller 7 .

Embodiment 3

[0052] Example 3: Using figure 2 A dynamic gas distribution device to configure about 400ppb hydrogen sulfide standard gas in high-purity nitrogen

[0053] Using high-purity nitrogen as the carrier gas and dilution gas source 1, the high-purity nitrogen passes through the pressure regulator valve 2 to control the pressure; the mass flow controller 3 controls the flow of the carrier gas passing through the diffusion cell 5; the mass flow controller 4 controls the flow of the dilution gas; The flow controller 7 controls the flow rate of forced venting; the hydrogen sulfide permeation tube 6 is placed in the diffusion cell 5 at 45°C, and its permeation rate is 0.763 μg / min; the flow regulating valve 10 controls the dilution gas flow rate entering the mixing chamber 9';

[0054] The mass rate of hydrogen sulfide entering the mixing chamber 9 is calculated by the following formula:

[0055] q = β M · ...

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Abstract

The invention provides a dynamic gas distribution system for producing a standard gas mixture with a concentration range of (10-9 to 10-6) mol / mol. The system includes: providing a diffusion tube containing a target substance in a temperature-controlled diffusion cell; making a predetermined flow of carrier gas flow through the diffusion cell containing the target substance, so that the carrier gas carries the target substance out of the diffusion cell; The carrier gas of the substance is divided into at least two carrier gas branch streams, wherein one carrier gas branch stream is communicated with the mixing chamber, and at least one of the flow paths of the two carrier gas branch streams is provided with a flow controller; the flow controller is adjusted , to change the flow rate of the carrier gas branch flow flowing into the mixing chamber; the dilution gas with a predetermined flow rate flows into the mixing chamber, and mixes with the above-mentioned carrier gas branch flow flowing into the mixing chamber in the mixing chamber, so as to obtain the target Standard gas mixture of the desired concentration of the substance.

Description

technical field [0001] The present invention relates to a kind of dynamic gas distribution system of standard gas, more specifically relate to a kind of utilizing diffusion tube or permeation tube to produce (about 10 -9 ~10 -6 ) Dynamic gas distribution system for standard gas mixtures in the mol / mol concentration range. Background technique [0002] In many industrial applications, for low concentrations of standard gases (such as about 10 -9 ~10 -6 mol / mol concentration range) is in increasing demand. At present, there are mainly two methods for preparing low-concentration standard gas mixtures, namely static method and dynamic method. The static method is to use weighing or pressure to prepare a certain concentration of the desired mixture, and then hold it in a container for use. The dynamic method is to introduce the target component into a pure diluent gas stream at substantially atmospheric pressure, obtain the desired concentration, and then use it in a specifi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01F15/04B01F3/02B01F23/10
Inventor 胡树国吴海韩桥刘新志
Owner NAT INST OF METROLOGY CHINA