Micro-focus X-ray precise perspective imaging detection equipment

Abstract

The invention relates to micro-focus X-ray precise perspective imaging detection equipment applied in the field of electronic and micro-electronic assembly, belonging to nondestructive full-automatic detection equipment and comprising a micro-electronic X-ray source, a ray image receiver, an X-ray emitting source, a multi-angle rotating three-dimensional detection device of a receiver, a four-axis mobile platform of a detected object, a computer and a layering control system, wherein the multi-angle rotating three-dimensional detection device and the four-axis mobile platform of the detected object are assembled into a mobile bracket body; the detected object is arranged on the four-axis mobile platform; the micro-electronic X-ray source and the ray image receiver are respectively arranged at the two ends of a bracket of the multi-angle rotating three-dimensional detection device; and the computer and the layering control system finish real-time mobile control and real-time image acquisition and processing. The invention is a new-generation nondestructive detection equipment which is especially applied in detection of electronic and micro-electronic products and production detection of various fine industries, thus being applied in the fields such as aviation, aerospace, military and industry.

Description

technical field [0001] The invention relates to a non-destructive automatic detection device, in particular to a micro-focus X-ray precision perspective imaging detection device used in the field of electronics and microelectronic assembly. Background technique [0002] X-ray imaging has been widely used in human body imaging and medicine, that is, the absorption of X-rays by different organs and tissues of the human body can be characterized by tissue density, and X-ray fluoroscopy and X-ray radiography have been developed, which can be used for human bones and internal organs. Diagnosis and localization of diseases or injuries of organs and blood vessels. [0003] At present, the main methods of non-destructive testing are: film photography method, image intensifier real-time imaging method, industrial CT imaging method, etc. Except for the industrial CT imaging method, other methods can only be used for two-dimensional imaging, and cannot obtain detailed information on t...

AI Technical Summary

Problems solved by technology

[0007] 1. The diameter of the focal point that generates X-rays is too large, which makes the resolution poor. It can only detect large objects and structures in the millimeter level, and it is difficult to detect the tiny internal structures clearly.

[0008] 2 It can only be used for two-dimensional plane detection, and cannot complete multi-angle three-dimensional detection, and cannot fully reflect the real internal structure of the measured object

[0009] 3 Adopt the power frequency transformation method, the stability of the high-voltage power supply is poor, which affects the quality of fluoroscopic images

[0010] In aviation, aerospace, military and industrial applications, it is necessary to inspect the internal structure of integrated circuits and various electronic devices in electronic and microelectronic assembly, as well as the micro solder joints of connecting wires. Fine features, so the current traditional X-ray detection methods and equipment can not meet

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