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Method for plating inner surface of long tube through arc ion plating with magnetic field and electric field enhancement

An arc ion plating and electric field enhancement technology, applied in ion implantation plating, sputtering plating, vacuum evaporation plating, etc., can solve problems such as coating, achieve convenient parameter adjustment, easy focusing and restraint, and ensure utilization efficiency Effect

Inactive Publication Date: 2012-02-08
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] The object of the present invention is to provide a method for depositing a thin film on the inner wall of a workpiece with a tubular structure using an arc ion plating process enhanced by a magnetic field and an electric field, so as to solve the problems of arc ion plating on the inner wall of a long tube, etc.

Method used

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  • Method for plating inner surface of long tube through arc ion plating with magnetic field and electric field enhancement
  • Method for plating inner surface of long tube through arc ion plating with magnetic field and electric field enhancement
  • Method for plating inner surface of long tube through arc ion plating with magnetic field and electric field enhancement

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Experimental program
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Effect test

Embodiment 1

[0049] After cleaning and drying the Φ60×100mm low-alloy steel mold with Φ30×70mm blind holes, fix it on the workpiece table of the arc ion plating device. Such as figure 1 As shown, the arc ion plating device mainly includes: vacuum chamber 1, workpiece magnetic field coil supporting cylinder I2, workpiece magnetic field coil 3, workpiece auxiliary electrode 6, plasma beam I7, plasma focusing magnetic field coil supporting cylinder I8, plasma Focusing magnetic field coil I9, cathode target I10, cathode target power supply 11, pulse bias power supply 12, workpiece table 13, etc., the specific structure is as follows:

[0050]The workpiece 4, the workpiece magnetic field coil supporting cylinder I2, the workpiece magnetic field coil 3, the workpiece auxiliary electrode 6 and the workpiece table 13 are arranged in the vacuum chamber 1, the workpiece magnetic field coil 3 is arranged outside the workpiece magnetic field coil supporting cylinder I2, and the workpiece magnetic fiel...

Embodiment 2

[0056] Clean and dry a Φ50×80mm stainless steel tube with a Φ25×60mm blind hole, and fix it on the workpiece table of the arc ion plating device. Such as figure 2 shown, with figure 1 The difference is that the magnetic field of the workpiece magnetic field coil 3 in this embodiment adopts a gradient magnetic field, and the gradient magnetic field means that the magnetic field generating device placed outside the tubular workpiece in the vacuum chamber is three electromagnetic coils, and parameters such as the wire diameter and winding density of the electromagnetic coil Similarly, the magnetic induction of these electromagnetic coils is realized by adjusting the current of the electromagnetic coils respectively, and the magnetic induction decreases gradually along the direction of the plasma beam, thereby forming a gradient magnetic field. The gradient magnetic field is relative to the uniform magnetic field, and its characteristic is that the magnetic induction intensity g...

Embodiment 3

[0060] Clean and dry the Φ50×200mm stainless steel part with a Φ30×140mm through hole, and fix it on the workpiece table of the arc ion plating device. Such as image 3 As shown, the arc ion plating device mainly includes: vacuum chamber 1, workpiece magnetic field coil supporting cylinder I2, workpiece magnetic field coil 3, workpiece auxiliary electrode 6, plasma focusing magnetic field coil supporting cylinder I8, plasma focusing magnetic field coil I9, cathode Target I10, cathode target power supply 11, pulse bias power supply 12, workpiece table 13, cathode target II14, plasma focusing magnetic field coil II15, plasma focusing magnetic field coil support cylinder II16, etc. The specific structure is as follows:

[0061] The workpiece 4, the workpiece magnetic field coil supporting cylinder I2, the workpiece magnetic field coil 3, the workpiece auxiliary electrode 6 and the workpiece table 13 are arranged in the vacuum chamber 1, the workpiece magnetic field coil 3 is arra...

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Abstract

The invention which belongs to the field of material surface modification relates to a method for plating the inner surface of a long tube through arc ion plating with magnetic field and electric field enhancement. The method is characterized in that: the movement locus of a plasma beam is constrained and controlled by a magnetic field in the process of arc ion plating, two sets of magnetic fieldgeneration apparatuses are arranged in an arc ion plating deposition apparatus, one set is arranged on a plasma transmission channel outside a vacuum chamber, the plasma beam is focused with the magnetic field to constrain the cross section diameter and the transmission efficiency of the plasma beam in transmission, and the other set is arranged on the outer side of a tubular workpiece in the vacuum chamber to guide the plasma beam to diffuse along the axial direction of the center of the tubular workpiece; and electric field enhancement is utilized in the arc ion plating because the electricfield allows the accelerated directional flow of the plasma to be realized, and the electric field enhancement is realized through arranging a pulse electric field in the workpiece. By utilizing the constraint and the control of the magnetic field and the electric field to the plasma beam, a purpose that the plasma deposites the film on the inner surface of the tube is realized, so the method is suitable for plating the inner surface of tubular workpieces which is used as a service surface.

Description

Technical field: [0001] The invention belongs to the field of material surface modification, and relates to a film coating method on the inner wall of a long tube using an arc ion plating process enhanced by a magnetic field and an electric field. Background technique: [0002] In industrial applications, the inner surface of a large number of metal workpieces needs to be modified, especially for pipe fittings, such as oil pump barrels on oil fields, oil pipelines, chemical pipelines, automobile cylinder liners, and military fields, especially on naval ships. For naval gun barrels, torpedo tubes, and other tubular parts whose inner walls need to be strengthened in harsh environments, ordinary treatment methods cannot meet the surface strengthening requirements. These workpieces often fail early due to inner wall wear, corrosion, and oxidation. Therefore, the development of surface modification technologies and processes with anti-wear, anti-corrosion, and anti-oxidation is a...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/04
Inventor 赵彦辉肖金泉杜昊华伟刚于宝海宫骏孙超
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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