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Wafer processing machine with automatic temperature control function

A wafer processing and functional technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as product abnormality and scrap, and achieve the effect of avoiding product abnormality or scrapping.

Inactive Publication Date: 2014-05-28
HEJIAN TECH SUZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The temperature is a very important parameter for the semiconductor processing technology, abnormal temperature may lead to abnormal or even scrapped products

Method used

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  • Wafer processing machine with automatic temperature control function
  • Wafer processing machine with automatic temperature control function

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Embodiment Construction

[0013] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0014] Such as figure 2 As shown, the present invention provides a wafer processing machine with an automatic temperature control function, including a reaction chamber, and the reaction chamber is provided with two temperature controllers, wherein,

[0015] The wafer processing machine is also provided with a comparator, the input terminals of the comparator are respectively connected with the two temperature controllers, and the output terminals of the comparator are connected with the alarm.

[0016] The wafer processing machine with automatic temperature control function of the present invent...

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Abstract

The invention discloses a wafer processing machine with an automatic temperature control function, which comprises a reaction chamber, a watlow temperature controller and an overtemperature controller are arranged on the reaction chamber, the wafer processing machine is also provided with a comparator, the input ends of the comparator are respectively connected with the watlow temperature controller and the overtemperature controller, and the output end of the comparator is connected with an alarm. The wafer processing machine utilizes the comparator to compare the temperature signals of the two temperature controllers on the reaction chamber and output a signal to give the alarm when the temperature difference is greater than a set value. Consequently, the abnormal temperature condition of the machine can be monitored and the alarm can be given, and thereby abnormal products or scrapped problems are prevented.

Description

technical field [0001] The invention relates to wafer processing equipment, in particular to a wafer processing machine with automatic temperature control function. Background technique [0002] At present, each reaction chamber of the Mattson Strip machine has two sets of temperature systems, which are respectively controlled by a Watlow thermostat and an over-temperature thermostat. The reaction chamber has two sets of thermocouples to sense the temperature. The default temperature value of the software is the reading value of the thermocouple by the Watlow thermostat, and the temperature control setting of the reaction chamber is only controlled by the Watlow thermostat. The over-temperature thermostat only performs over-temperature protection, and has no control function for the temperature of the reaction chamber, nor does it have a low-temperature alarm function. Such as figure 1 As shown, it is the structural diagram of the current temperature system of the machine,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
Inventor 王浩明
Owner HEJIAN TECH SUZHOU
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