Gas sensor and manufacturing technique thereof

Abstract

The invention discloses a gas sensor and a manufacturing technique of the gas sensor; the gas sensor comprises a silicon substrate, a silicon dioxide heat insulation stop layer, an interdigital signal electrode, a temperature measurement electrode and a heating electrode, wherein the silicon substrate is provided with a structure of a through hole; the upper surface of the silicon substrate comprises a silicon dioxide layer arranged on the top of the through hole; and the silicon dioxide layer is processed into a cantilever structure by a surface technique. The upper surface of the silicon dioxide layer is provided with an electrode group formed by the interdigital signal electrode, the temperature measurement electrode and the heating electrode, and the upper surface of the electrode group is provided with a tin dioxide layer. The technique disclosed by the invention leads the heating electrode, the interdigital signal electrode and the temperature measurement electrode to be manufactured in the same layer, so that the manufacturing complexity is reduced, and the yield is reduced; and the silicon dioxide layer of the sensor is corroded so as to form the cantilever structure, and a heat transmission channel is reduced, so that the power consumption of the sensor is lower.

Description

technical field [0001] The invention relates to the field of gas safety detection in the process of producing, storing and transporting toxic and harmful gases, in particular to a gas sensor and its manufacturing process. Background technique [0002] With the rapid development of society and the rapid advancement of science and technology, people's lives have shown different changes from the past. On the one hand, this change has greatly improved people's living standards and quality; The environment has caused immeasurable impact, and environmental pollution is becoming more and more serious. The scale of industrial production is gradually expanding, and the variety of products is increasing. Especially the rapid development of industries such as petroleum, chemical industry, coal mines, and automobiles has led to continuous occurrence of fire accidents and serious damage to the atmospheric environment. For example, some flammable, explosive, poisonous and harmful gases a...

AI Technical Summary

Problems solved by technology

[0003] The gas-sensing properties of metal oxide semiconductor nano-films often need to be heated to a certain temperature to be effective, so it is necessary to make a micro-heating plate under the film to provide sufficient temperature for the gas-sensing film, which brings a certain amount of power loss

However, the problem of excessive power consumption has always restricted the further development of MOS gas sensors.

In order to reduce power consumption, the bottom of the silicon substrate is often hollowed out, but the traditional heat insulation layer still conducts a large amount of heat to the silicon substrate, resulting in unnecessary power loss

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