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Touch pad sensor

A sensor and touch panel technology, applied in the direction of instruments, electrical digital data processing, data processing input/output process, etc., can solve problems such as inability to ensure electrical conductivity, and achieve difficult resistance increase, high reliability, and excellent durability Effect

Active Publication Date: 2015-04-29
KOBE STEEL LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when pure Al is used as the wiring material, insulating aluminum oxide is formed between the transparent conductive film of the touch panel sensor and the pure Al film, and there is a problem that conductivity cannot be ensured.

Method used

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  • Touch pad sensor

Examples

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Embodiment 1

[0032] With an alkali-free glass plate (thickness 0.7mm, diameter 4 inches) as the substrate, the types and contents of the rare earth elements shown in Table 1 below are formed on its surface by DC magnetic sputtering (the unit is atomic %, and the balance: Al and unavoidable impurities) different Al alloy films (both film thicknesses are about 500 nm). Make the atmosphere in the chamber reach vacuum degree before film formation: 3×10 -6 Torr, using a disc-shaped target with a diameter of 4 inches having the same composition as that of each Al alloy film, film formation was carried out under the following conditions. Next, the Al alloy after film formation was heat-treated at various annealing temperatures listed in Table 1 for 30 minutes in a nitrogen atmosphere. In Table 1, "-" means no heating (ie, room temperature). In addition, the composition of the formed Al alloy film was confirmed by an Inductively Coupled Plasma (ICP) mass spectrometry.

[0033] (sputtering condi...

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Abstract

The invention provides a touch pad sensor having advantages of good durability of load pressed from the vertical pressing, difficulty in breaking lines, ability of improving the resistance, and high reliability. The touch pad sensor is provided with a transparent conductive film and the wiring connected with the transparent conductive film. The wiring can be started from the substrate side, and is constituted by a metal film with a high melting point, A1 alloy membrane, and a metal film with a high melting point. The A1 alloy membrane contains a 0.05-1atom% rare-earth element having the hardness of 2-3.5GPa. The density of the grain boundary triple point existing in the A1 alloy organization is more than 2*108 per mm2.

Description

technical field [0001] The present invention relates to a touch panel sensor having a transparent conductive film and wiring connected thereto. Background technique [0002] The touch panel sensor, which is arranged on the front surface of the image display device and used as an input switch integrated with the image display device, is widely used in bank ATMs, ticket vending machines, navigation equipment, PDAs, copier operation screens, etc. due to its ease of use. field use. The detection method of the input point may, for example, be a resistive film method, a capacitance method, an optical method, an ultrasonic surface acoustic wave method, or a piezoelectric method. Among them, the resistive film method is most widely used for reasons such as low cost and simple structure. [0003] A resistive film type touch panel sensor is mainly composed of an upper electrode, a lower electrode, and a rear part. A transparent conductive film is provided on a substrate (such as a f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F3/041G06F3/045
Inventor 奥野博行三木绫钉宫敏洋
Owner KOBE STEEL LTD
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