SiCN/TiCN multi-layer film tool coating layer and preparation method thereof

A multi-layer film and cutting tool technology, applied in coating, cutting tools for lathes, metal material coating technology, etc., can solve the problems of high brittleness of coatings, and achieve stable coating performance, strong flexibility, and easy adjustment. Effect

Active Publication Date: 2014-03-05
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] SiCN coating is more brittle, and the internal stress will increase as the thickness increases, so if it is used as a single coating for tools, there must be weaknesses

Method used

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  • SiCN/TiCN multi-layer film tool coating layer and preparation method thereof

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Experimental program
Comparison scheme
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Embodiment Construction

[0021] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0022] Refer to attached figure 1 , the SiCN / TiCN multilayer film tool coating of the present invention selects the cemented carbide tool as the substrate, and on the basis of the tool substrate 1, first deposits a layer of TiCN layer 2, and then deposits a layer of SiCN layer 3, followed by alternate deposition The TiCN layer 2 and the SiCN layer 3 form a multilayer structure, and the outermost layer is the SiCN layer 3 .

[0023] Define the sum of the thicknesses of each adjacent single layer of TiCN and single layer of SiCN as the modulation period of the multilayer coating; define the ratio of the thickness of each single layer of TiCN and single layer of SiCN as the modulation ratio of the multilayer coating. Both the modulation period and the modulation ratio are variable, and the modulation period can be single period or multiple periods, and th...

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PUM

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Abstract

The invention discloses an SiCN / TiCN multi-layer film tool coating layer and a preparation method thereof. The SiCN / TiCN multi-layer film tool coating layer is prepared by alternately depositing SiCN and TiCN; the outermost layer of the coating layer is an SiCN layer, and the innermost layer of the coating layer is a TiCN layer. The multi-layer film coating layer fully combines the advantages of SiCN and TiCN thin films, realizes the multiple functions of one coating, has the characteristics of low friction, high hardness, anti-oxidation and the like and simultaneously can remarkably reduce the surface roughness of the tool. The SiCN / TiCN multi-layer film tool coating layer is obtained by adopting a vapor deposition process; the preparation process is relatively simple and is suitable for industrialized production; and the prepared coating layer is stable in performance and can be applied to different types of cutting tools.

Description

technical field [0001] The invention belongs to the technical field of mechanical cutting tool manufacturing, and in particular relates to a SiCN / TiCN multilayer film tool coating and a preparation method thereof. Background technique [0002] Depositing a hard coating on the surface of a metal tool can improve the performance of the tool, reduce processing costs, improve processing efficiency and quality, and prolong the service life of the tool. At present, common tool coatings use TiN, TiCN, TiAlN, CrN and DLC, etc., including their single-layer or multi-layer composite structure coatings. With the development of modern processing technology, especially the development of high-speed and high-precision CNC machine tools in the direction of replacing grinding with turning, milling instead of grinding, and drilling instead of reaming, the cutting performance, hardness, oxidation resistance and surface Higher requirements have been put forward in aspects such as smoothness. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06B23B27/14
Inventor 邵天敏魏松波
Owner TSINGHUA UNIV
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