High-pressure sensor chip with SOI (silicon on insulator) rectangular film structure

Abstract

The invention discloses a high-pressure sensor chip with an SOI rectangular film structure, which comprises a high-pressure sensor chip, wherein the central area at the bottom of the high-pressure sensor chip is corroded to form a rectangular film; four resistor strips are distributed at the part with the maximum stress on the rectangular film in the right face of the high-pressure sensor chip along the [110] crystal direction; pressure welding blocks are distributed between the periphery of the rectangular film and the edge of the high-pressure sensor chip, and connected with the resistor strips to form a Wheatstone bridge; and the bottom of the high-pressure sensor chip is in integral bonding to PYREX 7740# glass by an anodic bonding technology. By the Wheatstone bridge, the variation of the resistance value can be precisely shown, thus the purpose of signal output can be achieved. The high-pressure sensor chip disclosed by the invention has characteristics of wide range, high temperature resistance, desirable dynamic property, high precision, miniaturization, safe and reliable operation, and high adaptability.

Description

technical field [0001] The invention relates to a high-voltage sensor chip, in particular to an SOI rectangular film structure high-voltage sensor chip. Background technique [0002] With the continuous development of the world's petrochemical industry, the requirements for sensors in high-pressure environments are constantly increasing. At the same time, the demand for sensor types is also increasing. Most of the sensors used in China come from abroad. These sensors are not only expensive, but also within the scope of protection in the technical field. Technology blockade against China's sensor industry is not uncommon in foreign markets. Therefore, the continuous development of new sensors to meet the needs of the current domestic market is the first priority of the current sensor development. [0003] Large-scale industrial production such as petrochemical industry has high requirements for the pressure range of the sensor. On the basis of ensuring the sensitivity, line...

AI Technical Summary

Problems solved by technology

The processing technology of sensors with these structures is very precise, which greatly affects the yield of sensor chips in processing.

At the same time, the range of sensors with these structures is also very limited.

Therefore, in view of the above existing design defects, this design proposes a new structure of rectangular membrane high-voltage sensor chip design to solve the limitations of the piezoresistive high-voltage sensor in the processing technology and the limitation of the range

Images