Semiconductor micro air pressure sensor test system

A test system and micro-pressure technology, applied in the direction of measuring fluid pressure, instruments, measuring devices, etc., can solve problems such as difficult to achieve vacuum dynamic balance, unstable vacuum gas components, single test circuit, etc., to achieve stable air flow, gas group The effect of stable and uniform flow

Inactive Publication Date: 2012-07-11
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention mainly solves the technical problems that the original air pressure sensor test system is difficult to achieve vacuum dynamic balance, the vacuum gas composition is unstable and the test circuit is sin...

Method used

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  • Semiconductor micro air pressure sensor test system
  • Semiconductor micro air pressure sensor test system
  • Semiconductor micro air pressure sensor test system

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Embodiment

[0019] Embodiment: a kind of semiconductor micro pressure sensor testing system of the present embodiment, as figure 1 As shown, including the microcomputer control part and the vacuum acquisition part. The microcomputer control part includes control host, program-controlled power supply, drive circuit, test circuit, A / D card and D / A card. The control host controls the program-controlled power supply, loads voltage or current to the drive circuit, and provides four working modes for the device under test. , the response signal of the device under test is transmitted to the control host through the test circuit and the A / D card; the vacuum acquisition part includes a vacuum chamber, a pump unit, a mass flow controller (MFC) and a vacuum gauge, and the vacuum chamber is connected with the mass flow control The gas with stable composition flows in from the mass flow controller and flows out from the pump group. The mass flow controller is connected with the D / A card. Through the ...

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Abstract

The invention relate to a semiconductor micro air pressure sensor test system which comprises a microcomputer controlling part and a vacuum acquiring part. The microcomputer controlling part comprises a control host, a programmable power supply, a drive circuit, a test circuit, A/D card and a D/A card; the control host is used for controlling the programmable power supply; the response signal of a device under test is transmitted to the control host through the test circuit and the A/D card; the vacuum acquiring part comprises a vacuum chamber, a pump group, a mass flow controller and a vacuum gauge; the vacuum chamber is connected with the mass flow controller and the pump group; the air flows in from the mass flow controller and flows out from the pump group; the mass flow controller is connected with the D/A card and used for keeping the air pressure in the vacuum chamber balanced through the fuzzy PID (proportional-integral-differential) control algorithm; the vacuum gauge serves as the calibration reference of a sensor under test. The semiconductor micro air pressure sensor test system can generate the dynamically-balanced vacuum environment of the pure gas, improve the stability and the interference resistance of the testing process and provide four working circuits for the device under test and is convenient for the calibration and the test of a semiconductor micro air pressure sensor.

Description

technical field [0001] The invention relates to a sensor testing system, in particular to a semiconductor micro-pressure sensor testing system. Background technique [0002] Micro barometric pressure sensor is a pressure sensor for absolute barometric pressure measurement in near atmospheric pressure and vacuum range. Pressure sensor technology has developed rapidly, and has now shifted from traditional structural design and production to microstructural design based on microelectronics, microprocessing and processing. Semiconductor micro-pressure sensor is the product of this technology. It uses various sensitive mechanisms of semiconductor materials to develop into various semiconductor micro-pressure sensors such as piezoresistive, resonant and heating. [0003] If the semiconductor micro-pressure sensor is to have good working performance, it needs to be calibrated and tested with high precision and high stability. According to the characteristics of the semiconductor ...

Claims

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Application Information

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IPC IPC(8): G01L27/00
Inventor 金仁成刘光王晓东郭文泰唐祯安
Owner DALIAN UNIV OF TECH
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