Semiconductor micro air pressure sensor test system

Abstract

The invention relate to a semiconductor micro air pressure sensor test system which comprises a microcomputer controlling part and a vacuum acquiring part. The microcomputer controlling part comprises a control host, a programmable power supply, a drive circuit, a test circuit, A / D card and a D / A card; the control host is used for controlling the programmable power supply; the response signal of a device under test is transmitted to the control host through the test circuit and the A / D card; the vacuum acquiring part comprises a vacuum chamber, a pump group, a mass flow controller and a vacuum gauge; the vacuum chamber is connected with the mass flow controller and the pump group; the air flows in from the mass flow controller and flows out from the pump group; the mass flow controller is connected with the D / A card and used for keeping the air pressure in the vacuum chamber balanced through the fuzzy PID (proportional-integral-differential) control algorithm; the vacuum gauge serves as the calibration reference of a sensor under test. The semiconductor micro air pressure sensor test system can generate the dynamically-balanced vacuum environment of the pure gas, improve the stability and the interference resistance of the testing process and provide four working circuits for the device under test and is convenient for the calibration and the test of a semiconductor micro air pressure sensor.

Description

technical field [0001] The invention relates to a sensor testing system, in particular to a semiconductor micro-pressure sensor testing system. Background technique [0002] Micro barometric pressure sensor is a pressure sensor for absolute barometric pressure measurement in near atmospheric pressure and vacuum range. Pressure sensor technology has developed rapidly, and has now shifted from traditional structural design and production to microstructural design based on microelectronics, microprocessing and processing. Semiconductor micro-pressure sensor is the product of this technology. It uses various sensitive mechanisms of semiconductor materials to develop into various semiconductor micro-pressure sensors such as piezoresistive, resonant and heating. [0003] If the semiconductor micro-pressure sensor is to have good working performance, it needs to be calibrated and tested with high precision and high stability. According to the characteristics of the semiconductor ...

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Problems solved by technology

[0004] The invention mainly solves the technical problems that the original air pressure sensor test system is difficult to achieve vacuum dynamic balance, the vacuum gas composition is unstable and the test circuit is single; it provides a vacuum test system suitable for semiconductor micro air pressure sensors, the gas group in the vacuum chamber Very stable, wide air pressure test range, program control to achieve air pressure dynamic balance

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