MEMS-CMOS (micro-electromechanical systems-complementary metal-oxide-semiconductor transistor) SAF (safe, arm and fire) integrated chip based on microsystem integration technology

Abstract

The invention relates to an MEMS-CMOS (micro-electromechanical systems-complementary metal-oxide-semiconductor transistor) SAF (safe, arm and fire) integrated chip based on the microsystem integration technology. The MEMS-CMOS SAF integrated chip provided by the invention has a small volume and high reliability without movable structure, and is easy to produce in batch; and through the invention, all functions of a basic SAF system are integrated on an MEMS-CMOS SAF integrated chip for a fuze based on the microsystem integration technology. The MEMS-CMOS SAF integrated chip provided by the invention comprises a safety and failure control micro-component, a starting, timing, logic safety and fire control and failure control micro-component and a micro fire member. The chip can realize four functions of safe, arm, fire and failure, and can set the fire mode and preset the fire delay time so as to facilitate batch production and realize good generality.

Description

technical field [0001] The invention relates to a safety, arm and fire system, specifically a MEMS-CMOS integrated chip for safety, arm and fire (Safe, Arm and Fire) designed based on microsystem integration technology. Background technique [0002] The Safe & Arm system is the key mechanism to ensure the normal function of the ignition control device and the safety of daily service processing. In recent years, with the development of micro-system integration technology, this technology has been applied to the design and manufacture of S&A systems It is a hotspot of current and future S&A technology research. Applying the microsystem integration technology to the safety and security system can reduce the size of the S&A system, improve reliability and add new intelligent functions. Most of the current micro-S&A systems only realize the safe explosion-proof and release two environmental force insurance functions in the safety system. A few highly integrated products integrat...

AI Technical Summary

Problems solved by technology

Most of the current micro-S&A systems only realize the safe explosion-proof and release two environmental force insurance functions in the safety system. A few highly integrated products integrate the mechanical safety device, telemarketer and explosion-proof device for micro-system integration. However, the traditional bridge wire detonator is still the primary pyrotechnic product. Since the design needs to consider the influence of the shape of the detonator and the connection relationship with the system, the inability to achieve the integrated design of SAF affects the safety and reliability of the system.

At the same time, because most of the mechanical safety devices in the system are MEMS elastic structures, the performance of elastic elements has a great influence on the reliability of the system, and it is not easy to assemble, which is not conducive to the large-scale and low-cost use of electromechanical micro-S&A systems.

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